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GB1437174A - Ion gauges - Google Patents

Ion gauges

Info

Publication number
GB1437174A
GB1437174A GB2501772A GB2501772A GB1437174A GB 1437174 A GB1437174 A GB 1437174A GB 2501772 A GB2501772 A GB 2501772A GB 2501772 A GB2501772 A GB 2501772A GB 1437174 A GB1437174 A GB 1437174A
Authority
GB
United Kingdom
Prior art keywords
collector
electrode
rays
ion
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2501772A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Components Ltd
Original Assignee
Mullard Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mullard Ltd filed Critical Mullard Ltd
Priority to GB2501772A priority Critical patent/GB1437174A/en
Priority to US363823A priority patent/US3906237A/en
Publication of GB1437174A publication Critical patent/GB1437174A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Measurement Of Radiation (AREA)

Abstract

1437174 lonization monometers MULLARD Ltd 20 July 1973 [26 May 1972] 25017/72 Heading H1D An ionization manometer comprises cathodes 1, 2, an ionization region 13 defined by perforated walls 4, 5 and an end wall 6 opaque to soft X-rays and having an ion exit aperture 7, an elongated ion collector 10 and a reflector electrode 31 biased to cause the ions to converge on the collector 10 and so formed that most X- rays formed in the ionisation region 13 are multiply reflected between the reflector electrode and a truncated conical member 35 attached thereto and therefore the radiation is attenuated before it can reach the collector electrode 10. The rear of the collector and its lead are further shielded by an insulating bead 36 and a shield 37. An extractor electrode 39 is provided between aperture 7 and the collector 10. Reference has been directed by the Comptroller to Specification 1,173,354.
GB2501772A 1972-05-26 1972-05-26 Ion gauges Expired GB1437174A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB2501772A GB1437174A (en) 1972-05-26 1972-05-26 Ion gauges
US363823A US3906237A (en) 1972-05-26 1973-05-25 Ion gauges

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2501772A GB1437174A (en) 1972-05-26 1972-05-26 Ion gauges

Publications (1)

Publication Number Publication Date
GB1437174A true GB1437174A (en) 1976-05-26

Family

ID=10220876

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2501772A Expired GB1437174A (en) 1972-05-26 1972-05-26 Ion gauges

Country Status (2)

Country Link
US (1) US3906237A (en)
GB (1) GB1437174A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4338535A1 (en) * 1993-11-11 1995-05-18 Leybold Ag Extractor ionization vacuum meter

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307323A (en) * 1980-04-04 1981-12-22 Granville-Phillips Company Vacuum gauge
US5491331A (en) * 1994-04-25 1996-02-13 Pilot Industries, Inc. Soft x-ray imaging device
US7428848B2 (en) * 2005-08-09 2008-09-30 Cfd Research Corporation Electrostatic sampler and method
US8304033B2 (en) * 2009-02-04 2012-11-06 Tel Epion Inc. Method of irradiating substrate with gas cluster ion beam formed from multiple gas nozzles
US20100243913A1 (en) * 2009-03-31 2010-09-30 Tel Epion Inc. Pre-aligned nozzle/skimmer
WO2015114559A1 (en) * 2014-01-31 2015-08-06 Nanotech Analysis S.R.L.S. Miniaturized device for measurements of very low pressure and of gas concentrations
US9540725B2 (en) 2014-05-14 2017-01-10 Tel Epion Inc. Method and apparatus for beam deflection in a gas cluster ion beam system

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2819404A (en) * 1951-05-25 1958-01-07 Herrnring Gunther Optical image-forming mirror systems having aspherical reflecting surfaces
US2759106A (en) * 1951-05-25 1956-08-14 Wolter Hans Optical image-forming mirror system providing for grazing incidence of rays
US2766385A (en) * 1952-09-11 1956-10-09 Herrnring Gunther Optical image-forming plural reflecting mirror systems
DE1130619B (en) * 1960-06-03 1962-05-30 Leybolds Nachfolger E Ionization manometer system
NL284213A (en) * 1961-10-11
US3292078A (en) * 1961-12-08 1966-12-13 Gca Corp Vacuum gauge having an X-ray trap and a shield
US3341727A (en) * 1965-11-03 1967-09-12 Univ Illinois Ionization gauge having a photocurrent suppressor electrode
US3320455A (en) * 1966-04-22 1967-05-16 Gen Electric Ionization vacuum gauge having x-ray shielding means
DE1648650A1 (en) * 1966-05-17 1971-07-22 Politechnika Warszawska Ionization vacuum meter for lowest pressures
US3465189A (en) * 1966-10-13 1969-09-02 Canadian Patents Dev Ionization vacuum gauge with x-ray shielding and ion reflecting means
US3466484A (en) * 1967-04-27 1969-09-09 Nasa Ionization vacuum gauge with all but the end of the ion collector shielded
US3509418A (en) * 1968-05-03 1970-04-28 Philips Corp Ionization manometer including means for modulation of terminal grids
GB1237028A (en) * 1969-04-28 1971-06-30 Mullard Ltd Ion source
GB1336126A (en) * 1969-10-29 1973-11-07 Mullard Ltd Ion gauges

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4338535A1 (en) * 1993-11-11 1995-05-18 Leybold Ag Extractor ionization vacuum meter
DE4338535C2 (en) * 1993-11-11 2003-06-18 Unaxis Deutschland Holding Extractor ion gauge

Also Published As

Publication number Publication date
US3906237A (en) 1975-09-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees