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CA843390A - Apparatus and process for the epitaxial growth of silicon carbide - Google Patents

Apparatus and process for the epitaxial growth of silicon carbide

Info

Publication number
CA843390A
CA843390A CA843390A CA843390DA CA843390A CA 843390 A CA843390 A CA 843390A CA 843390 A CA843390 A CA 843390A CA 843390D A CA843390D A CA 843390DA CA 843390 A CA843390 A CA 843390A
Authority
CA
Canada
Prior art keywords
silicon carbide
epitaxial growth
epitaxial
growth
carbide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA843390A
Inventor
Li Chu Ting
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Publication date
Application granted granted Critical
Publication of CA843390A publication Critical patent/CA843390A/en
Expired legal-status Critical Current

Links

CA843390A Apparatus and process for the epitaxial growth of silicon carbide Expired CA843390A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA843390T

Publications (1)

Publication Number Publication Date
CA843390A true CA843390A (en) 1970-06-02

Family

ID=36327598

Family Applications (1)

Application Number Title Priority Date Filing Date
CA843390A Expired CA843390A (en) Apparatus and process for the epitaxial growth of silicon carbide

Country Status (1)

Country Link
CA (1) CA843390A (en)

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