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CA967080A - Method and apparatus for liquid-phase epitaxial growth - Google Patents

Method and apparatus for liquid-phase epitaxial growth

Info

Publication number
CA967080A
CA967080A CA153,457A CA153457A CA967080A CA 967080 A CA967080 A CA 967080A CA 153457 A CA153457 A CA 153457A CA 967080 A CA967080 A CA 967080A
Authority
CA
Canada
Prior art keywords
liquid
epitaxial growth
phase epitaxial
phase
growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA153,457A
Other versions
CA153457S (en
Inventor
Kozo Ariga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7905271A external-priority patent/JPS5137142B2/ja
Priority claimed from JP46100523A external-priority patent/JPS5137144B2/ja
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Application granted granted Critical
Publication of CA967080A publication Critical patent/CA967080A/en
Expired legal-status Critical Current

Links

CA153,457A 1971-10-06 1972-10-06 Method and apparatus for liquid-phase epitaxial growth Expired CA967080A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7905271A JPS5137142B2 (en) 1971-10-06 1971-10-06
JP46100523A JPS5137144B2 (en) 1971-12-10 1971-12-10

Publications (1)

Publication Number Publication Date
CA967080A true CA967080A (en) 1975-05-06

Family

ID=26420125

Family Applications (1)

Application Number Title Priority Date Filing Date
CA153,457A Expired CA967080A (en) 1971-10-06 1972-10-06 Method and apparatus for liquid-phase epitaxial growth

Country Status (1)

Country Link
CA (1) CA967080A (en)

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