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CA2150739A1 - Methode de deposition d'un revetement composite de diamant sur un substrat dur - Google Patents

Methode de deposition d'un revetement composite de diamant sur un substrat dur

Info

Publication number
CA2150739A1
CA2150739A1 CA 2150739 CA2150739A CA2150739A1 CA 2150739 A1 CA2150739 A1 CA 2150739A1 CA 2150739 CA2150739 CA 2150739 CA 2150739 A CA2150739 A CA 2150739A CA 2150739 A1 CA2150739 A1 CA 2150739A1
Authority
CA
Canada
Prior art keywords
diamond
depositing
tin
intermediate layer
compound
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2150739
Other languages
English (en)
Inventor
Deepak G. Bhat
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Valenite LLC
Original Assignee
Valenite LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valenite LLC filed Critical Valenite LLC
Publication of CA2150739A1 publication Critical patent/CA2150739A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/274—Diamond only using microwave discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides
    • C23C16/345—Silicon nitride

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
CA 2150739 1994-06-14 1995-06-01 Methode de deposition d'un revetement composite de diamant sur un substrat dur Abandoned CA2150739A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US26028394A 1994-06-14 1994-06-14
US08/260,283 1994-06-14

Publications (1)

Publication Number Publication Date
CA2150739A1 true CA2150739A1 (fr) 1995-12-15

Family

ID=22988547

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2150739 Abandoned CA2150739A1 (fr) 1994-06-14 1995-06-01 Methode de deposition d'un revetement composite de diamant sur un substrat dur

Country Status (3)

Country Link
JP (1) JPH0860366A (fr)
CA (1) CA2150739A1 (fr)
DE (1) DE19521007A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19753092A1 (de) * 1997-11-29 1999-06-10 Keipke Roy Dipl Ing Mit einem Diamantfilm beschichtetes Schneidrad
DE10339443A1 (de) * 2003-04-11 2004-10-21 Dirk Richter Walzenbeschichtungsverfahren und Walzenbeschichtung
JP4373294B2 (ja) * 2004-07-09 2009-11-25 日本碍子株式会社 ハニカム構造体成形用口金、及びその製造方法
FR2969178A1 (fr) * 2010-12-20 2012-06-22 A2C Soc Procede pour le revetement diamant cvd sur les carbures de tungstene sans preparation chimique du carbure
EP3144412A1 (fr) * 2015-09-15 2017-03-22 HILTI Aktiengesellschaft Plaquette de coupe et procede de fabrication
JP2019077452A (ja) * 2017-10-20 2019-05-23 中山　弘 包装用袋体及びその包装用フィルムの製造装置
CN108505016B (zh) * 2018-04-08 2020-04-17 河南佰特科技有限公司 一种cvd金刚石厚膜的沉积方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3552939A (en) * 1964-08-05 1971-01-05 Texas Instruments Inc Metal carbide coatings on metal substrates
US3640689A (en) * 1970-03-04 1972-02-08 Fansteel Inc Composite hard metal product
SE442305B (sv) * 1984-06-27 1985-12-16 Santrade Ltd Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen
DE3515919A1 (de) * 1985-05-03 1986-11-06 Fried. Krupp Gmbh, 4300 Essen Verschleissfester beschichteter hartmetallkoerper und verfahren zu seiner herstellung
DE3690606C2 (de) * 1985-11-25 1995-09-21 Yoichi Hirose Verfahren zur Synthese von Diamant
US4992082A (en) * 1989-01-12 1991-02-12 Ford Motor Company Method of toughening diamond coated tools
US5100703A (en) * 1989-02-23 1992-03-31 Toshiba Tungaloy Co., Ltd. Diamond-coated sintered body excellent in adhesion and process for preparing the same
CA2061944C (fr) * 1991-03-08 1999-01-26 Naoya Omori Materiau dur carbone et diamante ou materiau du genre
IL98174A0 (en) * 1991-05-17 1992-06-21 Iscar Ltd Chemical vapor deposition of diamond coatings on hard substrates

Also Published As

Publication number Publication date
JPH0860366A (ja) 1996-03-05
DE19521007A1 (de) 1995-12-21

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Dead