BR9703820A - Detector de pressão diferencial capacitiva - Google Patents

Detector de pressão diferencial capacitiva

Info

Publication number: BR9703820A
Authority: BR; Brazil
Prior art keywords: differential pressure; pressure detector; capacitive differential; capacitive; detector
Prior art date: 1996-07-01

Application number

BR9703820A

Other languages

English (en)

Inventor

Kimihiro Nakamura

Shinichi Souma

Tadanori Yuhara

Original Assignee

Fuji Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1996-07-01

Filing date

1997-07-01

Publication date

1998-08-25

1997-07-01 Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd

1998-08-25 Publication of BR9703820A publication Critical patent/BR9703820A/pt

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Ceramic Engineering (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Measuring Fluid Pressure (AREA)

BR9703820A 1996-07-01 1997-07-01 Detector de pressão diferencial capacitiva BR9703820A (pt)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP17094196A JP3147778B2 (ja)	1996-07-01	1996-07-01	静電容量式差圧検出器

Publications (1)

Publication Number	Publication Date
BR9703820A true BR9703820A (pt)	1998-08-25

Family

ID=15914214

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BR9703820A BR9703820A (pt)	1996-07-01	1997-07-01	Detector de pressão diferencial capacitiva

Country Status (5)

Country	Link
US (1)	US5925824A (pt)
JP (1)	JP3147778B2 (pt)
CN (1)	CN1119637C (pt)
BR (1)	BR9703820A (pt)
GB (1)	GB2314933B (pt)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US20040099061A1 (en) *	1997-12-22	2004-05-27	Mks Instruments	Pressure sensor for detecting small pressure differences and low pressures
US6568274B1 (en)	1998-02-04	2003-05-27	Mks Instruments, Inc.	Capacitive based pressure sensor design
US6772640B1 (en)	2000-10-10	2004-08-10	Mks Instruments, Inc.	Multi-temperature heater for use with pressure transducers
FR2818676B1 (fr) *	2000-12-27	2003-03-07	Freyssinet Int Stup	Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
KR100404904B1 (ko)	2001-06-09	2003-11-07	전자부품연구원	차동 용량형 압력센서 및 그 제조방법
US6993973B2 (en) *	2003-05-16	2006-02-07	Mks Instruments, Inc.	Contaminant deposition control baffle for a capacitive pressure transducer
US7249515B2 (en) *	2003-09-09	2007-07-31	Endress + Hauser Gmbh + Co. Kg	Capacitive pressure sensor
US7137301B2 (en) *	2004-10-07	2006-11-21	Mks Instruments, Inc.	Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US9249008B2 (en)	2012-12-20	2016-02-02	Industrial Technology Research Institute	MEMS device with multiple electrodes and fabricating method thereof
CN103063356A (zh) *	2012-12-25	2013-04-24	天津俞昌科技有限公司	一种高精度差压变送器
DE102013113594A1 (de) *	2013-12-06	2015-06-11	Endress + Hauser Gmbh + Co. Kg	Differenzdrucksensor
DE102015119272A1 (de) *	2015-11-09	2017-05-11	Endress+Hauser Gmbh+Co. Kg	Kapazitiver Drucksensor und Verfahren zu dessen Herstellung
DE102017126121A1 (de)	2017-11-08	2019-05-09	Tdk Electronics Ag	Drucksensorsystem mit Schutz vor einfrierendem Medium
CN111982383B (zh) *	2020-07-06	2021-12-07	厦门大学	一种差压接触式mems电容薄膜真空规
CN112326094B (zh) *	2020-10-29	2022-02-18	陕西理工大学	一种压力传感器及尿动力检测装置
CN114646420B (zh) *	2022-05-19	2022-07-29	成都倍芯传感技术有限公司	一种高可靠性的压力变送器

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4390925A (en) *	1981-08-26	1983-06-28	Leeds & Northrup Company	Multiple-cavity variable capacitance pressure transducer
US4424713A (en) *	1982-06-11	1984-01-10	General Signal Corporation	Silicon diaphragm capacitive pressure transducer
IL82960A0 (en) *	1986-06-30	1987-12-20	Rosemount Inc	Differential pressure sensor
JP2639159B2 (ja) *	1989-04-14	1997-08-06	富士電機株式会社	静電容量式差圧検出器

1996
- 1996-07-01 JP JP17094196A patent/JP3147778B2/ja not_active Expired - Fee Related
1997
- 1997-06-27 US US08/884,355 patent/US5925824A/en not_active Expired - Lifetime
- 1997-06-30 GB GB9713633A patent/GB2314933B/en not_active Expired - Fee Related
- 1997-07-01 BR BR9703820A patent/BR9703820A/pt not_active Application Discontinuation
- 1997-07-01 CN CN97114086.3A patent/CN1119637C/zh not_active Expired - Fee Related

Also Published As

Publication number	Publication date
GB2314933B (en)	2000-09-27
GB9713633D0 (en)	1997-09-03
CN1119637C (zh)	2003-08-27
JP3147778B2 (ja)	2001-03-19
CN1172949A (zh)	1998-02-11
GB2314933A (en)	1998-01-14
US5925824A (en)	1999-07-20
JPH1019708A (ja)	1998-01-23

Publication	Publication Date	Title
DE59508560D1 (de)	2000-08-17	Kapazitiver Drucksensor
DE59701961D1 (de)	2000-08-10	Druck- oder Differenzdruckmesser
BR9508763A (pt)	1998-06-02	Transmissor de pressão diferencial
BR9001722A (pt)	1991-05-21	Detetor capacitivo de pressao diferencial
DE59700172D1 (de)	1999-07-01	Kapazitiver Kraftsensor
DK0735353T3 (da)	1999-09-06	Trykføler
FR2717262B1 (fr)	1997-09-26	Détecteur de pression.
FI951462A (fi)	1995-10-07	Paine-erokytkin
DK0674164T3 (da)	1998-02-23	Kapacitativ trykføler eller differenstrykføler
BR9711484A (pt)	1999-08-24	Unidade de sensor de pressÆo
BR9703820A (pt)	1998-08-25	Detector de pressão diferencial capacitiva
DE69508003D1 (de)	1999-04-08	Differentialkapazitivgeber
NL1002159A1 (nl)	1996-07-23	Verschildrukindicateur.
NO942410L (no)	1994-12-27	Kapasitiv differensial-trykkföler
NL1002238A1 (nl)	1996-08-06	Verschildrukindicateur.
NO970305D0 (no)	1997-01-24	Differensiell deteksjons mottaker
BR9602096A (pt)	1998-10-06	Detector de proximidade
BR9501970A (pt)	1995-12-12	Aparelho para detecção de pressão diferencial
DE59505227D1 (de)	1999-04-08	Drucksensor
KR960034621U (ko)	1996-11-21	압력센서
FR2728072B1 (fr)	1997-01-10	Detecteur de fuite
FI965017A0 (fi)	1996-12-13	Tryckgivare
DE59809419D1 (de)	2003-10-02	Druckdifferenz-messumformer
DE69725348D1 (de)	2003-11-06	Andruckrollenanordnung
KR960022792U (ko)	1996-07-20	압력센서

Legal Events

Date	Code	Title	Description
2003-10-14	FA10	Dismissal: dismissal - article 33 of industrial property law
2004-06-01	B11Y	Definitive dismissal - extension of time limit for request of examination expired [chapter 11.1.1 patent gazette]