BG94619A - Метод за изпаряване на съединения,използвани за нанасянето им под формата на пари - Google Patents
Метод за изпаряване на съединения,използвани за нанасянето им под формата на париInfo
- Publication number
- BG94619A BG94619A BG094619A BG9461991A BG94619A BG 94619 A BG94619 A BG 94619A BG 094619 A BG094619 A BG 094619A BG 9461991 A BG9461991 A BG 9461991A BG 94619 A BG94619 A BG 94619A
- Authority
- BG
- Bulgaria
- Prior art keywords
- evaporation
- vapor
- apply
- compounds used
- compounds
- Prior art date
Links
- 150000001875 compounds Chemical class 0.000 title 1
- 230000008020 evaporation Effects 0.000 title 1
- 238000001704 evaporation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
- C03C17/245—Oxides by deposition from the vapour phase
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/80—Feeding the burner or the burner-heated deposition site
- C03B2207/85—Feeding the burner or the burner-heated deposition site with vapour generated from liquid glass precursors, e.g. directly by heating the liquid
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/229—Non-specific enumeration
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/152—Deposition methods from the vapour phase by cvd
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Sampling And Sample Adjustment (AREA)
- Surface Treatment Of Glass Fibres Or Filaments (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42263689A | 1989-10-17 | 1989-10-17 | |
US07/591,121 US5090985A (en) | 1989-10-17 | 1990-10-04 | Method for preparing vaporized reactants for chemical vapor deposition |
PCT/US1990/005905 WO1991005743A1 (en) | 1989-10-17 | 1990-10-15 | Method for preparing vaporized reactants for chemical vapor deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
BG94619A true BG94619A (bg) | 1993-12-24 |
Family
ID=27025695
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BG094619A BG94619A (bg) | 1989-10-17 | 1991-06-13 | Метод за изпаряване на съединения,използвани за нанасянето им под формата на пари |
Country Status (26)
Country | Link |
---|---|
US (1) | US5090985A (bg) |
EP (1) | EP0450016B1 (bg) |
JP (1) | JP3078835B2 (bg) |
KR (1) | KR0147042B1 (bg) |
CN (1) | CN1025322C (bg) |
AT (1) | ATE133147T1 (bg) |
AU (1) | AU632175B2 (bg) |
BG (1) | BG94619A (bg) |
BR (1) | BR9005227A (bg) |
CA (1) | CA2027761A1 (bg) |
CZ (1) | CZ502090A3 (bg) |
DE (1) | DE69024938T2 (bg) |
ES (1) | ES2082007T3 (bg) |
HU (1) | HU213646B (bg) |
IE (1) | IE903601A1 (bg) |
MX (1) | MX173282B (bg) |
MY (1) | MY107107A (bg) |
NO (1) | NO304109B1 (bg) |
NZ (1) | NZ235700A (bg) |
PL (1) | PL167110B1 (bg) |
PT (1) | PT95613B (bg) |
RO (1) | RO111756B1 (bg) |
RU (1) | RU2062258C1 (bg) |
TR (1) | TR25795A (bg) |
WO (1) | WO1991005743A1 (bg) |
YU (1) | YU47521B (bg) |
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CN102824864B (zh) * | 2011-06-15 | 2015-03-11 | 中国南玻集团股份有限公司 | 汽化混合装置 |
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KR102040758B1 (ko) | 2011-08-05 | 2019-11-05 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 증기 처리 시스템 및 방법 |
CN102584019B (zh) * | 2012-01-31 | 2014-07-02 | 绥中滨海经济区红杉科技有限公司 | 化学汽相沉积法镀制玻璃减反射膜的设备及方法 |
KR102204773B1 (ko) * | 2015-10-13 | 2021-01-18 | 인프리아 코포레이션 | 유기주석 옥사이드 하이드록사이드 패터닝 조성물, 전구체 및 패터닝 |
EP3387163B1 (en) | 2015-12-11 | 2020-04-29 | Cardinal CG Company | Method of coating both sides of a substrate |
WO2018093985A1 (en) | 2016-11-17 | 2018-05-24 | Cardinal Cg Company | Static-dissipative coating technology |
CN111517625A (zh) * | 2020-06-18 | 2020-08-11 | 福州新福兴浮法玻璃有限公司 | 一种用于生产无表观缺陷玻璃的锡槽 |
CN115613005A (zh) * | 2021-07-16 | 2023-01-17 | 长鑫存储技术有限公司 | 雾化装置与薄膜沉积系统 |
WO2024052668A1 (en) | 2022-09-06 | 2024-03-14 | Pilkington Group Limited | Process for depositing a layer |
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-
1990
- 1990-10-04 US US07/591,121 patent/US5090985A/en not_active Expired - Lifetime
- 1990-10-08 IE IE360190A patent/IE903601A1/en unknown
- 1990-10-15 RU SU904895861A patent/RU2062258C1/ru not_active IP Right Cessation
- 1990-10-15 RO RO147803A patent/RO111756B1/ro unknown
- 1990-10-15 ES ES90915247T patent/ES2082007T3/es not_active Expired - Lifetime
- 1990-10-15 EP EP90915247A patent/EP0450016B1/en not_active Expired - Lifetime
- 1990-10-15 DE DE69024938T patent/DE69024938T2/de not_active Expired - Lifetime
- 1990-10-15 JP JP02514192A patent/JP3078835B2/ja not_active Expired - Lifetime
- 1990-10-15 MY MYPI90001794A patent/MY107107A/en unknown
- 1990-10-15 AU AU65297/90A patent/AU632175B2/en not_active Ceased
- 1990-10-15 AT AT90915247T patent/ATE133147T1/de not_active IP Right Cessation
- 1990-10-15 HU HU907561A patent/HU213646B/hu not_active IP Right Cessation
- 1990-10-15 KR KR1019910700609A patent/KR0147042B1/ko not_active IP Right Cessation
- 1990-10-15 WO PCT/US1990/005905 patent/WO1991005743A1/en active IP Right Grant
- 1990-10-16 CA CA002027761A patent/CA2027761A1/en not_active Abandoned
- 1990-10-16 NZ NZ235700A patent/NZ235700A/xx unknown
- 1990-10-16 YU YU194490A patent/YU47521B/sh unknown
- 1990-10-16 CZ CS905020A patent/CZ502090A3/cs unknown
- 1990-10-17 BR BR909005227A patent/BR9005227A/pt not_active IP Right Cessation
- 1990-10-17 PL PL90287364A patent/PL167110B1/pl unknown
- 1990-10-17 MX MX022885A patent/MX173282B/es unknown
- 1990-10-17 TR TR90/0955A patent/TR25795A/xx unknown
- 1990-10-17 PT PT95613A patent/PT95613B/pt not_active IP Right Cessation
- 1990-10-17 CN CN90109124A patent/CN1025322C/zh not_active Expired - Fee Related
-
1991
- 1991-06-13 BG BG094619A patent/BG94619A/bg unknown
- 1991-06-14 NO NO912320A patent/NO304109B1/no unknown
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