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BE888344A - Procede et dispositif d'alignement d'un masque et d'une tranche, - Google Patents

Procede et dispositif d'alignement d'un masque et d'une tranche,

Info

Publication number
BE888344A
BE888344A BE0/204424A BE204424A BE888344A BE 888344 A BE888344 A BE 888344A BE 0/204424 A BE0/204424 A BE 0/204424A BE 204424 A BE204424 A BE 204424A BE 888344 A BE888344 A BE 888344A
Authority
BE
Belgium
Prior art keywords
aligning
wafer
mask
Prior art date
Application number
BE0/204424A
Other languages
English (en)
Inventor
A White
M Feldman
D White
Original Assignee
Western Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co filed Critical Western Electric Co
Publication of BE888344A publication Critical patent/BE888344A/fr

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G03F9/703—Gap setting, e.g. in proximity printer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
BE0/204424A 1980-04-11 1981-04-09 Procede et dispositif d'alignement d'un masque et d'une tranche, BE888344A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/139,544 US4326805A (en) 1980-04-11 1980-04-11 Method and apparatus for aligning mask and wafer members

Publications (1)

Publication Number Publication Date
BE888344A true BE888344A (fr) 1981-07-31

Family

ID=22487191

Family Applications (1)

Application Number Title Priority Date Filing Date
BE0/204424A BE888344A (fr) 1980-04-11 1981-04-09 Procede et dispositif d'alignement d'un masque et d'une tranche,

Country Status (9)

Country Link
US (1) US4326805A (fr)
JP (1) JPS56157033A (fr)
BE (1) BE888344A (fr)
CA (1) CA1154175A (fr)
DE (1) DE3114682A1 (fr)
FR (1) FR2482285A1 (fr)
GB (1) GB2073950B (fr)
IT (1) IT1137326B (fr)
NL (1) NL189632C (fr)

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Also Published As

Publication number Publication date
DE3114682A1 (de) 1981-12-24
FR2482285A1 (fr) 1981-11-13
JPS56157033A (en) 1981-12-04
DE3114682C2 (fr) 1987-05-21
JPH0132649B2 (fr) 1989-07-10
IT8121022A0 (it) 1981-04-09
IT1137326B (it) 1986-09-10
US4326805A (en) 1982-04-27
NL189632B (nl) 1993-01-04
NL8101776A (nl) 1981-11-02
GB2073950A (en) 1981-10-21
CA1154175A (fr) 1983-09-20
NL189632C (nl) 1993-06-01
GB2073950B (en) 1984-04-18
FR2482285B1 (fr) 1985-02-01

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: WESTERN ELECTRIC CY INC.

Effective date: 20000430