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BE786137A - METHOD AND DEVICE FOR EPITAXIAL DEPOSITION OF A LAYER OF CRYSTALLINE MATERIAL ON A FLAT SIDE OF A MONOCRYSTALLINE SUBSTRATE FROM A LIQUID PHASE - Google Patents

METHOD AND DEVICE FOR EPITAXIAL DEPOSITION OF A LAYER OF CRYSTALLINE MATERIAL ON A FLAT SIDE OF A MONOCRYSTALLINE SUBSTRATE FROM A LIQUID PHASE

Info

Publication number
BE786137A
BE786137A BE786137DA BE786137A BE 786137 A BE786137 A BE 786137A BE 786137D A BE786137D A BE 786137DA BE 786137 A BE786137 A BE 786137A
Authority
BE
Belgium
Prior art keywords
layer
liquid phase
crystalline material
flat side
epitaxial deposition
Prior art date
Application number
Other languages
Dutch (nl)
Inventor
R T C Radiotechnique-Compelec
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication date
Publication of BE786137A publication Critical patent/BE786137A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
BE786137D 1971-07-13 METHOD AND DEVICE FOR EPITAXIAL DEPOSITION OF A LAYER OF CRYSTALLINE MATERIAL ON A FLAT SIDE OF A MONOCRYSTALLINE SUBSTRATE FROM A LIQUID PHASE BE786137A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7125739A FR2145831A6 (en) 1971-07-13 1971-07-13

Publications (1)

Publication Number Publication Date
BE786137A true BE786137A (en) 1973-01-11

Family

ID=9080335

Family Applications (1)

Application Number Title Priority Date Filing Date
BE786137D BE786137A (en) 1971-07-13 METHOD AND DEVICE FOR EPITAXIAL DEPOSITION OF A LAYER OF CRYSTALLINE MATERIAL ON A FLAT SIDE OF A MONOCRYSTALLINE SUBSTRATE FROM A LIQUID PHASE

Country Status (8)

Country Link
JP (1) JPS5219191B1 (en)
BE (1) BE786137A (en)
CA (1) CA978663A (en)
DE (1) DE2233734C3 (en)
FR (1) FR2145831A6 (en)
GB (1) GB1399918A (en)
IT (1) IT964629B (en)
NL (1) NL7209537A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120081A (en) * 1974-08-12 1976-02-17 Hitachi Ltd Ketsushoseichohoho oyobi sochi

Also Published As

Publication number Publication date
DE2233734B2 (en) 1977-08-25
JPS5219191B1 (en) 1977-05-26
DE2233734A1 (en) 1973-01-18
IT964629B (en) 1974-01-31
NL7209537A (en) 1973-01-16
CA978663A (en) 1975-11-25
DE2233734C3 (en) 1978-04-27
FR2145831A6 (en) 1973-02-23
GB1399918A (en) 1975-07-02

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: N.V. PHILIPS'GLOEILAMPENFABRIEKEN

Effective date: 19910731