FR2145831A6 - - Google Patents
Info
- Publication number
- FR2145831A6 FR2145831A6 FR7125739A FR7125739A FR2145831A6 FR 2145831 A6 FR2145831 A6 FR 2145831A6 FR 7125739 A FR7125739 A FR 7125739A FR 7125739 A FR7125739 A FR 7125739A FR 2145831 A6 FR2145831 A6 FR 2145831A6
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/12—Liquid-phase epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BE786137D BE786137A (nl) | 1971-07-13 | Werkwijze en inrichting voor het epitaxiaal afzetten van een laag uit kristallijn materiaal op een vlakke zijde van een monokristallijn substraat vanuit een vloeistoffase | |
FR7125739A FR2145831A6 (fr) | 1971-07-13 | 1971-07-13 | |
NL7209537A NL7209537A (fr) | 1971-07-13 | 1972-07-08 | |
DE19722233734 DE2233734C3 (de) | 1971-07-13 | 1972-07-08 | Verfahren und Vorrichtung zum epitaktischen Aufwachsen einer Einkristallschicht auf einem einkristallinen Substrat durch Flüssigphasen-Epitaxie |
GB3213272A GB1399918A (en) | 1971-07-13 | 1972-07-10 | Epitaxial crystal deposition |
IT6922172A IT964629B (it) | 1971-07-13 | 1972-07-10 | Procedimento e dispositivo per la deposizione epitassiale di un mate riale cristallino su un substrato monocristallino da fase liquida |
CA146,902A CA978663A (en) | 1971-07-13 | 1972-07-12 | Method and device for the epitaxial deposition of a layer of crystalline material on a flat side of a monocrystalline substrate from a liquid phase |
JP6958872A JPS5219191B1 (fr) | 1971-07-13 | 1972-07-13 | |
US05/535,045 US3933123A (en) | 1971-07-13 | 1974-12-19 | Liquid phase epitaxy |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7125739A FR2145831A6 (fr) | 1971-07-13 | 1971-07-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2145831A6 true FR2145831A6 (fr) | 1973-02-23 |
Family
ID=9080335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7125739A Expired FR2145831A6 (fr) | 1971-07-13 | 1971-07-13 |
Country Status (8)
Country | Link |
---|---|
JP (1) | JPS5219191B1 (fr) |
BE (1) | BE786137A (fr) |
CA (1) | CA978663A (fr) |
DE (1) | DE2233734C3 (fr) |
FR (1) | FR2145831A6 (fr) |
GB (1) | GB1399918A (fr) |
IT (1) | IT964629B (fr) |
NL (1) | NL7209537A (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5120081A (en) * | 1974-08-12 | 1976-02-17 | Hitachi Ltd | Ketsushoseichohoho oyobi sochi |
-
0
- BE BE786137D patent/BE786137A/nl not_active IP Right Cessation
-
1971
- 1971-07-13 FR FR7125739A patent/FR2145831A6/fr not_active Expired
-
1972
- 1972-07-08 DE DE19722233734 patent/DE2233734C3/de not_active Expired
- 1972-07-08 NL NL7209537A patent/NL7209537A/xx unknown
- 1972-07-10 IT IT6922172A patent/IT964629B/it active
- 1972-07-10 GB GB3213272A patent/GB1399918A/en not_active Expired
- 1972-07-12 CA CA146,902A patent/CA978663A/en not_active Expired
- 1972-07-13 JP JP6958872A patent/JPS5219191B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE2233734C3 (de) | 1978-04-27 |
DE2233734B2 (de) | 1977-08-25 |
NL7209537A (fr) | 1973-01-16 |
CA978663A (en) | 1975-11-25 |
IT964629B (it) | 1974-01-31 |
BE786137A (nl) | 1973-01-11 |
JPS5219191B1 (fr) | 1977-05-26 |
GB1399918A (en) | 1975-07-02 |
DE2233734A1 (de) | 1973-01-18 |