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AU7786700A - Transport device - Google Patents

Transport device

Info

Publication number
AU7786700A
AU7786700A AU77867/00A AU7786700A AU7786700A AU 7786700 A AU7786700 A AU 7786700A AU 77867/00 A AU77867/00 A AU 77867/00A AU 7786700 A AU7786700 A AU 7786700A AU 7786700 A AU7786700 A AU 7786700A
Authority
AU
Australia
Prior art keywords
transport device
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU77867/00A
Inventor
Hubert Jarnig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ortner Cls Cleanroom Logistic System GmbH
Original Assignee
ORTNER LUFTUNGS und KLIMAANLAG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ORTNER LUFTUNGS und KLIMAANLAG filed Critical ORTNER LUFTUNGS und KLIMAANLAG
Publication of AU7786700A publication Critical patent/AU7786700A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
AU77867/00A 1999-10-22 2000-10-10 Transport device Abandoned AU7786700A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19951200 1999-10-22
DE1999151200 DE19951200C2 (en) 1999-10-22 1999-10-22 transport device
PCT/EP2000/009911 WO2001031690A1 (en) 1999-10-22 2000-10-10 Transport device

Publications (1)

Publication Number Publication Date
AU7786700A true AU7786700A (en) 2001-05-08

Family

ID=7926710

Family Applications (1)

Application Number Title Priority Date Filing Date
AU77867/00A Abandoned AU7786700A (en) 1999-10-22 2000-10-10 Transport device

Country Status (4)

Country Link
EP (1) EP1222682A1 (en)
AU (1) AU7786700A (en)
DE (1) DE19951200C2 (en)
WO (1) WO2001031690A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10128712C2 (en) * 2001-06-13 2003-06-18 Erich Thallner Device with at least two columns, along which a component can be moved vertically

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63242824A (en) * 1987-03-25 1988-10-07 Tabai Esupetsuku Kk Article transporting conveyor
JPH0555350A (en) * 1991-08-28 1993-03-05 Murata Mach Ltd Device for cleanly holding article in overhead article conveyer device
JPH05136110A (en) * 1991-11-08 1993-06-01 Nec Ibaraki Ltd Sealing structure of liquid tank device with lifting/ lowering functions
JPH061564A (en) * 1992-06-15 1994-01-11 Kokusai Electric Co Ltd Elevator
DE19542646C2 (en) * 1995-03-28 2003-04-30 Brooks Automation Gmbh Loading and unloading station for semiconductor processing systems
US5664925A (en) * 1995-07-06 1997-09-09 Brooks Automation, Inc. Batchloader for load lock
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US6280134B1 (en) * 1997-06-17 2001-08-28 Applied Materials, Inc. Apparatus and method for automated cassette handling

Also Published As

Publication number Publication date
EP1222682A1 (en) 2002-07-17
WO2001031690A1 (en) 2001-05-03
DE19951200C2 (en) 2003-01-30
DE19951200A1 (en) 2001-05-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase