JPH05136110A - Sealing structure of liquid tank device with lifting/ lowering functions - Google Patents
Sealing structure of liquid tank device with lifting/ lowering functionsInfo
- Publication number
- JPH05136110A JPH05136110A JP3293397A JP29339791A JPH05136110A JP H05136110 A JPH05136110 A JP H05136110A JP 3293397 A JP3293397 A JP 3293397A JP 29339791 A JP29339791 A JP 29339791A JP H05136110 A JPH05136110 A JP H05136110A
- Authority
- JP
- Japan
- Prior art keywords
- liquid tank
- lifting
- doors
- door
- elevating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、ガイドポスト及び昇降
牽引部を有する昇降機能付液槽装置における密閉機構に
関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sealing mechanism in a liquid tank device with a lifting function having a guide post and a lifting / lowering traction part.
【0002】[0002]
【従来の技術】従来の昇降機能付液槽装置は図5に示す
ように、ガイドポスト3と昇降牽引部4とを有してお
り、昇降開始前に液槽1にふた7をして、昇降終了後に
再びふた7をするという構造のものであった。2. Description of the Related Art As shown in FIG. 5, a conventional liquid tank device with an elevating function has a guide post 3 and an elevating and pulling section 4, and a lid 7 is placed on the liquid tank 1 before starting the elevating operation. The structure was such that the lid 7 was closed again after the lifting and lowering was completed.
【0003】[0003]
【発明が解決しようとする課題】この従来の密閉化構造
では、昇降動作中は液槽1を密閉化することができず、
液槽1中に揮発性溶剤を使用する場合や、液槽1中で蒸
気相を形成させる場合には、昇降動作中に液槽1外にガ
スとして放散してしまうという問題点があった。In this conventional sealed structure, the liquid tank 1 cannot be sealed during the lifting operation,
When a volatile solvent is used in the liquid tank 1 or when a vapor phase is formed in the liquid tank 1, there is a problem that gas is diffused outside the liquid tank 1 during the lifting operation.
【0004】特に、液槽1中で人体に有害な物質を使用
する場合は、法規則(例:有機溶剤中毒予防規則,鉛中
毒予防規則)により、作業面に一定の風量以上の排気を
行わなければならず、これにより昇降動作中のガス放散
量は更に増加してしまう。In particular, when a substance harmful to the human body is used in the liquid tank 1, the work surface is evacuated to a certain amount or more in accordance with legal regulations (eg, organic solvent poisoning prevention rule, lead poisoning prevention rule). This has to be done, which further increases the amount of gas released during the lifting operation.
【0005】本発明の目的は、昇降動作中も液槽中の揮
発性溶剤や蒸気相のガスとしての放散を避けるようにし
た昇降機能付液槽装置の密閉構造を提供することにあ
る。It is an object of the present invention to provide a closed structure of a liquid tank device with a lifting function, which is designed to avoid the emission of volatile solvent or vapor phase gas in the liquid tank during the lifting operation.
【0006】[0006]
【課題を解決するための手段】前記目的を達成するた
め、本発明に係る昇降機能付液槽装置の密閉構造におい
ては、バスケットをガイドポストに案内させ、該バスケ
ットを昇降牽引部により液槽の内外に昇降させる昇降機
能付液槽装置において、前記液槽の開口部を開閉する扉
を有しており、該扉は、前後又は左右に開閉動作するも
のであり、しかも、前記ガイドポスト及び昇降牽引部を
挿通させる切り取り部が設けられたものである。In order to achieve the above-mentioned object, in a closed structure of a liquid tank device with an elevating function according to the present invention, a basket is guided by a guide post, and the basket is moved by an elevating and pulling part to the liquid tank. In a liquid tank device with an elevating function for elevating in and out, there is a door that opens and closes the opening of the liquid tank, and the door opens and closes in the front and back or left and right. A cutout portion for inserting the towing portion is provided.
【0007】[0007]
【作用】本発明は、複数のガイドポスト及び昇降牽引部
の当たる部分を切り取った扉を取りつけ、装置正面に対
して前後あるいは左右に扉を開閉させたり、また扉を多
段に設けたりして、昇降動作に連動させて扉の開閉を行
うことにより、液槽を昇降動作中も密閉させる。According to the present invention, a door in which a plurality of guide posts and portions of the lifting / lowering pulling portion which are in contact with each other are cut out is attached, and the door is opened / closed forward / backward or left / right with respect to the front surface of the device, or the doors are provided in multiple stages. By opening and closing the door in conjunction with the lifting operation, the liquid tank is sealed even during the lifting operation.
【0008】[0008]
【実施例】以下本発明の実施例について図面を参照して
説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0009】(実施例1)図1に示すように、液槽1の
上面開口を覆う扉は、左右に分割された2枚の扉5a,
5bからなる。2枚の扉5a,5bは、その突き合せ端
縁に、2本のガイドポスト3,3の外周に嵌合する切り
取り部6aと、昇降牽引部4に係合する切り取り部6b
とを有している。(Embodiment 1) As shown in FIG. 1, the door covering the upper opening of the liquid tank 1 is composed of two doors 5a, which are divided into left and right.
It consists of 5b. The two doors 5a and 5b have a cutout portion 6a fitted to the outer circumferences of the two guide posts 3 and 3 and a cutout portion 6b engaged with the elevating and pulling portion 4 at their abutting edges.
And have.
【0010】2枚の扉5a,5bの切り取り部6aは、
突き合された場合にガイドポスト3,3の外周に密に接
触する。また、切り取り部6bは、昇降牽引部4の上下
動に支障を与えない程度で突き合わされる。また、2枚
の扉5a,5bは、前後方向に移動される。The cutout portion 6a of the two doors 5a and 5b is
When they are butted, they closely contact the outer circumferences of the guide posts 3, 3. Further, the cutout portions 6b are butted to each other to such an extent that they do not hinder the vertical movement of the elevating and pulling portion 4. Further, the two doors 5a and 5b are moved in the front-rear direction.
【0011】液槽1内を移動するバスケット2は、2本
のガイドポスト3に案内され、チェーンやワイヤーなど
の2本の昇降牽引部4により昇降動作を行う。The basket 2 moving in the liquid tank 1 is guided by two guide posts 3 and is moved up and down by two lifting and pulling parts 4 such as chains and wires.
【0012】作業原点位置Aにあるバスケット2は、装
置正面に対して前後方向に扉5a,5bが開いた後に下
降を始める。バスケット2が液槽1内に繰り入れられる
と、2枚の扉5a,5bが閉じる。そのため、昇降牽引
部4は扉5aと5bの切り取り部6bを通して上下動す
ることとなる。The basket 2 at the work origin position A starts descending after the doors 5a and 5b are opened in the front-rear direction with respect to the front surface of the apparatus. When the basket 2 is put into the liquid tank 1, the two doors 5a and 5b are closed. Therefore, the elevating and pulling unit 4 moves up and down through the cutouts 6b of the doors 5a and 5b.
【0013】バスケット2は、扉5a,5bが閉じたま
ま下降を続け、洗浄やリフローなどの装置の目的作業が
終了すると、再び上昇を始め、往路とは逆の順序で扉5
a,5bの開閉が行われ、装置のサイクルは終了する。The basket 2 continues to descend while the doors 5a and 5b are closed, and when the intended work of the apparatus such as cleaning and reflow is completed, the basket 2 starts to rise again, and the door 5 is reversed in the reverse order of the forward path.
The opening and closing of a and 5b are performed, and the cycle of the apparatus is completed.
【0014】(実施例2)図2に示す実施例では、チェ
ーンやワイヤーなどの昇降牽引部4を1本にすることに
より、扉5a,5bの昇降牽引部4が当たる切り取り部
6bを1箇所にすることができ、扉5a,5bの昇降牽
引部が当たる部分の密閉性は2倍に向上する。扉5a,
5bの開閉は、装置正面に対して前後に行われ、装置の
サイクルは図1に示した実施例と同様である。(Embodiment 2) In the embodiment shown in FIG. 2, the number of the lifting / lowering tow portions 4 of the doors 5a and 5b is one, and the number of the cut-out portions 6b to which the lifting / lowering tow portions 4 of the doors 5a and 5b are placed is one. Therefore, the airtightness of the portions of the doors 5a and 5b which the lifting / lowering pulling portions come into contact with is doubled. Door 5a,
The opening and closing of 5b is performed back and forth with respect to the front of the device, and the cycle of the device is similar to that of the embodiment shown in FIG.
【0015】(実施例3)図3に示す実施例では、チェ
ーンやワイヤーなどの昇降牽引部4を1本にし、扉5
a,5bの昇降牽引部4が当たる切り取り部6bを1箇
所にすることにより、密閉性を向上させることは、図2
に示した実施例と同様である。本実施例では、2本の分
断されたガイドポスト3a,3bにより装置正面に対し
て左右に扉5a,5bを開閉することができる。装置正
面に対して前後に扉5a,5bを開閉する場合は、装置
正面側に扉5a,5bを開けるためのスペースを確保す
る必要があり、装置前面より作業原位置が遠くなるが、
本実施例では、扉5a,5bが左右に開くため、液槽1
の開口部面積の大きい大型の装置では作業が容易とな
る。装置のサイクルは図1に示した実施例と同様であ
る。(Embodiment 3) In the embodiment shown in FIG. 3, the lifting / lowering pulling section 4 such as a chain or a wire is provided in one, and the door 5 is used.
It is possible to improve the airtightness by providing only one cut-out portion 6b with which the elevating and pulling portion 4 of a and 5b abuts.
It is similar to the embodiment shown in FIG. In this embodiment, the doors 5a and 5b can be opened and closed to the left and right with respect to the front of the apparatus by the two guide posts 3a and 3b which are divided. When the doors 5a and 5b are opened and closed with respect to the front side of the device, it is necessary to secure a space for opening the doors 5a and 5b on the front side of the device, and the work original position is far from the front face of the device.
In this embodiment, since the doors 5a and 5b are opened left and right, the liquid tank 1
With a large-sized device having a large opening area, the work becomes easy. The cycle of the device is similar to that of the embodiment shown in FIG.
【0016】(実施例4)図4に示した実施例では、液
槽1内を移動するバスケット2は、2本のガイドポスト
3に案内され、チェーンやワイヤーなどの昇降牽引部4
により昇降動作を行うことは、前述の図1から図3に示
した実施例と同様であるが、多段化された扉5a,5b
により密閉性が向上する。(Embodiment 4) In the embodiment shown in FIG. 4, the basket 2 moving in the liquid tank 1 is guided by the two guide posts 3 and lifted and pulled by a chain, wire or the like 4
The raising and lowering operation is performed in the same manner as in the embodiment shown in FIGS. 1 to 3 described above, but the doors 5a and 5b having a multi-stage structure are used.
This improves the airtightness.
【0017】作業原位置にあるバスケット2は、上段の
扉5a,5bが開いた後にガイドポスト3bに案内され
て下降を始め、扉5a,5bより下方まで移動すると、
上段の扉5a,5bが閉じる。その後バスケット2は、
下段の扉5a,5bまで達し、下段の扉5a,5bが開
いた後にガイドポスト3cに案内されて下降を始める。After the upper doors 5a, 5b are opened, the basket 2 in the original working position is guided by the guide posts 3b to start descending, and when it moves to a position below the doors 5a, 5b,
The upper doors 5a and 5b are closed. Then basket 2
After reaching the lower doors 5a and 5b and opening the lower doors 5a and 5b, they are guided by the guide post 3c and start descending.
【0018】バスケット2が下段の扉5a,5bより下
方に達すると、下段の扉5a,5bが閉じるように連動
している。尚、上段と下段との扉5aと扉5bの開閉動
作は、同時に開くようには連動しておらず、上段の扉の
開放時は、下段の扉が閉じており、また下段の扉の開放
時は、上段の扉が閉じている。When the basket 2 reaches below the lower doors 5a and 5b, the lower doors 5a and 5b are interlocked so as to close. The upper and lower doors 5a and 5b are not opened and closed at the same time. When the upper door is opened, the lower door is closed and the lower door is opened. At time, the upper door is closed.
【0019】バスケット2は、下段の扉が閉じたまま下
降を続け、洗浄やリフローなどの装置の目的作業が終了
すると再び上昇を始め、往路とは逆の順序で上下段の扉
5a,5bの開閉が行われ、装置サイクルは終了する。The basket 2 continues to descend with the lower door closed, and starts to rise again when the target work of the apparatus such as cleaning and reflow is completed, and the upper and lower doors 5a and 5b are reversed in the reverse order of the forward path. It is opened and closed and the device cycle ends.
【0020】本実施例によれば、作業面に一定の風量以
上の排気を必要とする場合、液槽1内に排気の影響を与
えないため、ガス放散を抑制できる。According to the present embodiment, when the work surface needs to be exhausted with a certain amount of air or more, since the exhaust is not influenced in the liquid tank 1, the gas emission can be suppressed.
【0021】[0021]
【発明の効果】以上説明したように本発明は、液槽中の
揮発性溶剤や、蒸気相のガスとしての放散を避けること
ができる。As described above, according to the present invention, it is possible to avoid the emission of volatile solvent in the liquid tank or vapor phase gas.
【0022】また、装置正面に対して左右に扉を開閉す
ることにより、装置正面に対して前後に扉を開閉する場
合のように扉の開閉スペースを装置前面に考慮する必要
がなく、装置を小型化できるという効果がある。Further, by opening and closing the door to the left and right with respect to the front of the device, there is no need to consider the opening and closing space of the door on the front of the device as in the case of opening and closing the door forward and backward with respect to the front of the device. There is an effect that it can be miniaturized.
【図1】本発明の実施例1を示す斜視図である。FIG. 1 is a perspective view showing a first embodiment of the present invention.
【図2】本発明の実施例2を示す斜視図である。FIG. 2 is a perspective view showing a second embodiment of the present invention.
【図3】本発明の実施例3を示す斜視図である。FIG. 3 is a perspective view showing a third embodiment of the present invention.
【図4】本発明の実施例4を示す斜視図である。FIG. 4 is a perspective view showing a fourth embodiment of the present invention.
【図5】従来の昇降機能付液槽装置を示す斜視図であ
る。FIG. 5 is a perspective view showing a conventional liquid tank device with a lifting function.
1 液槽 2 バスケット 3,3a,3b,3c ガイドポスト 4 昇降牽引部 5a,5b 扉 6a,6b 切り取り部 1 Liquid Tank 2 Baskets 3, 3a, 3b, 3c Guide Posts 4 Lifting / Drawing Parts 5a, 5b Doors 6a, 6b Cutout Parts
Claims (1)
該バスケットを昇降牽引部により液槽の内外に昇降させ
る昇降機能付液槽装置において、 前記液槽の開口部を開閉する扉を有しており、 該扉は、前後又は左右に開閉動作するものであり、しか
も、前記ガイドポスト及び昇降牽引部を挿通させる切り
取り部が設けられたものであることを特徴とする昇降機
能付液槽装置の密閉構造。1. The basket is guided to a guide post,
A liquid tank device with an elevating function for elevating the basket in and out of the liquid tank by an elevating and pulling unit, having a door that opens and closes the opening of the liquid tank, and the door opens and closes in the front-rear direction or the left-right direction. In addition, a sealing structure for a liquid tank device with an elevating function, characterized in that a cutout portion for inserting the guide post and the elevating and pulling portion is provided.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3293397A JPH05136110A (en) | 1991-11-08 | 1991-11-08 | Sealing structure of liquid tank device with lifting/ lowering functions |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3293397A JPH05136110A (en) | 1991-11-08 | 1991-11-08 | Sealing structure of liquid tank device with lifting/ lowering functions |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH05136110A true JPH05136110A (en) | 1993-06-01 |
Family
ID=17794240
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3293397A Pending JPH05136110A (en) | 1991-11-08 | 1991-11-08 | Sealing structure of liquid tank device with lifting/ lowering functions |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH05136110A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6007671A (en) * | 1992-10-28 | 1999-12-28 | Fujitsu Limited | Method for hydrogen plasma down-flow processing and apparatus thereof |
WO2001031690A1 (en) * | 1999-10-22 | 2001-05-03 | Ortner Cls Gmbh Cleanroom Logistic System | Transport device |
AT412373B (en) * | 2001-06-13 | 2005-01-25 | Thallner Erich | DEVICE CONTAINING AT LEAST TWO PILLARS ALONG WHICH A COMPONENT CAN BE VERTICALLY PLACED IN A DESIRED POSITION |
-
1991
- 1991-11-08 JP JP3293397A patent/JPH05136110A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6007671A (en) * | 1992-10-28 | 1999-12-28 | Fujitsu Limited | Method for hydrogen plasma down-flow processing and apparatus thereof |
WO2001031690A1 (en) * | 1999-10-22 | 2001-05-03 | Ortner Cls Gmbh Cleanroom Logistic System | Transport device |
AT412373B (en) * | 2001-06-13 | 2005-01-25 | Thallner Erich | DEVICE CONTAINING AT LEAST TWO PILLARS ALONG WHICH A COMPONENT CAN BE VERTICALLY PLACED IN A DESIRED POSITION |
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