[go: up one dir, main page]

AU7422898A - Method for inspecting chambers, inspection device and industrial process chambers - Google Patents

Method for inspecting chambers, inspection device and industrial process chambers

Info

Publication number
AU7422898A
AU7422898A AU74228/98A AU7422898A AU7422898A AU 7422898 A AU7422898 A AU 7422898A AU 74228/98 A AU74228/98 A AU 74228/98A AU 7422898 A AU7422898 A AU 7422898A AU 7422898 A AU7422898 A AU 7422898A
Authority
AU
Australia
Prior art keywords
chambers
inspection device
inspecting
industrial process
process chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU74228/98A
Inventor
Christian S. Michaelsen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU7422898A publication Critical patent/AU7422898A/en
Abandoned legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00Arrangement of monitoring devices; Arrangement of safety devices
    • F27D21/02Observation or illuminating devices
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B23/00Telescopes, e.g. binoculars; Periscopes; Instruments for viewing the inside of hollow bodies; Viewfinders; Optical aiming or sighting devices
    • G02B23/24Instruments or systems for viewing the inside of hollow bodies, e.g. fibrescopes
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D21/00Arrangement of monitoring devices; Arrangement of safety devices
    • F27D21/02Observation or illuminating devices
    • F27D2021/026Observation or illuminating devices using a video installation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Astronomy & Astrophysics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Monitoring And Testing Of Nuclear Reactors (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)
  • Furnace Housings, Linings, Walls, And Ceilings (AREA)

Abstract

In order to inspect process chambers (3) during operation, a video camera (9) is inserted in the chamber through a relatively small inspection hole (1) using a lance (7). The camera (9) is rotated to the desired position in relation to the lance (7) using remote-controlled drive units (13, 15).
AU74228/98A 1998-05-29 1998-05-29 Method for inspecting chambers, inspection device and industrial process chambers Abandoned AU7422898A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CH1998/000228 WO1999063382A1 (en) 1998-05-29 1998-05-29 Method for inspecting chambers, inspection device and industrial process chambers

Publications (1)

Publication Number Publication Date
AU7422898A true AU7422898A (en) 1999-12-20

Family

ID=4551331

Family Applications (1)

Application Number Title Priority Date Filing Date
AU74228/98A Abandoned AU7422898A (en) 1998-05-29 1998-05-29 Method for inspecting chambers, inspection device and industrial process chambers

Country Status (6)

Country Link
EP (1) EP1082634B1 (en)
JP (1) JP2002517775A (en)
AT (1) ATE214167T1 (en)
AU (1) AU7422898A (en)
DE (1) DE59900947D1 (en)
WO (2) WO1999063382A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8175120B2 (en) 2000-02-07 2012-05-08 Ipr Licensing, Inc. Minimal maintenance link to support synchronization
US9525923B2 (en) 1997-12-17 2016-12-20 Intel Corporation Multi-detection of heartbeat to reduce error probability
US8155096B1 (en) 2000-12-01 2012-04-10 Ipr Licensing Inc. Antenna control system and method
CA2867406C (en) 2001-06-13 2016-08-02 Intel Corporation Transmittal of heartbeat signal at a lower level than heartbeat request
JP4749019B2 (en) * 2005-04-01 2011-08-17 新日本製鐵株式会社 In-furnace inspection equipment for vertical furnaces
NO20092734A (en) * 2009-07-20 2010-12-13 Statoil Asa X-ray equipment for monitoring coke deposits in furnaces
DE102011122771B4 (en) 2011-10-22 2018-04-05 Audi Ag Camera protective housing for arranging a camera in an air-conditioned room with changing climatic conditions
JP5616475B2 (en) * 2013-03-27 2014-10-29 株式会社栗本鐵工所 In-pipe inspection device
KR102053982B1 (en) * 2019-09-04 2020-01-22 신동신 Method for Inspecting the Inside of a Furnace at High Temperature and Imaging Apparatus used in the Method
JP7699911B2 (en) * 2020-01-31 2025-06-30 三菱重工業株式会社 Furnace monitoring structure, boiler equipped with the same, monitoring system, and inspection method
KR102169118B1 (en) * 2020-06-17 2020-10-22 서울특별시 corrosion evaluation test device for steel
IT202000018511A1 (en) * 2020-07-30 2022-01-30 Danieli Automation Spa INSPECTION EQUIPMENT AND RELATED METHOD

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3764736A (en) * 1971-03-03 1973-10-09 Combustion Eng Remote visual examination apparatus
US4131914A (en) * 1975-09-23 1978-12-26 Bricmont & Associates, Inc. Method and apparatus for inspecting refractory lining in coke oven chambers and the like
JPS5479104A (en) * 1977-12-08 1979-06-23 Kurosaki Refractories Co Lining apparatus equipped with television camera
EP0152301B1 (en) * 1984-02-13 1989-04-19 Mitsubishi Denki Kabushiki Kaisha Apparatus for inspecting the interior of a vacuum vessel
KR960008026B1 (en) * 1988-04-06 1996-06-19 시나가와시로렌가 가부시기가이샤 Apparatus for observing the interior of a hot furnace

Also Published As

Publication number Publication date
JP2002517775A (en) 2002-06-18
EP1082634A1 (en) 2001-03-14
DE59900947D1 (en) 2002-04-11
WO1999063382A1 (en) 1999-12-09
EP1082634B1 (en) 2002-03-06
ATE214167T1 (en) 2002-03-15
WO1999063383A1 (en) 1999-12-09

Similar Documents

Publication Publication Date Title
AU7422898A (en) Method for inspecting chambers, inspection device and industrial process chambers
TW370691B (en) Method for removing photoresist and plasma etch residues
WO2004023787A3 (en) Signal intensity range transformation apparatus and method
CA2211600A1 (en) Apparatus for and method of testing leakage of hollow member
AU3354099A (en) Pipe inspection apparatus and process
AU5230899A (en) Heart wall tension reduction apparatus and method
AU4697800A (en) A method and apparatus for inspecting solder paste deposits on substrates
NO983062L (en) A method for forming a window in a pipe and apparatus for use in said method
WO2003007805A3 (en) Cartilage repair apparatus and method
EP0660098A3 (en) Visual inspection method and apparatus for contact lenses.
AU2001288225A1 (en) Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation
WO2003023363A3 (en) Microcantilever apparatus and methods for detection of enzymes
AU2002327245A1 (en) Method and apparatus for manipulating a sample
AU2587599A (en) Method and apparatus for establishing anastomotic passageways
AU2907392A (en) Automatic soldering apparatus, teaching apparatus thereof and teaching method thereof, soldering inspection apparatus and its inspection method, and automatic soldering correction apparatus and its correction method
CA2235021A1 (en) A method and apparatus for monitoring gas(es) in a dielectric fluid
AU1298701A (en) Method and device for diagnosing an inflammatory process
EP0642009A3 (en) Method and apparatus for testing refrigerant.
CA2353206A1 (en) Apparatus and method for reconstructing a ligament
ZA942452B (en) Gas lance apparatus and method.
AU2001261497A1 (en) Improved method and apparatus for treating spots on a spotting table with a spotting gun
TW350975B (en) Method and equipment of processing sample for optical analysis, and method of controlling the equipment thereof in the semiconductor device manufacturing process
AU2001227112A1 (en) Kit for Detecting Microorganisms, Apparatus for Quantifying Microorganisms and Method for Quantifying Microorganisms
AU1411900A (en) Method and apparatus for wafer inspection
AU2001261168A1 (en) Apparatus and process for simulating and analyzing a system with failure modes

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase