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AU2003284565A1 - Ferroelectric memory array - Google Patents

Ferroelectric memory array

Info

Publication number
AU2003284565A1
AU2003284565A1 AU2003284565A AU2003284565A AU2003284565A1 AU 2003284565 A1 AU2003284565 A1 AU 2003284565A1 AU 2003284565 A AU2003284565 A AU 2003284565A AU 2003284565 A AU2003284565 A AU 2003284565A AU 2003284565 A1 AU2003284565 A1 AU 2003284565A1
Authority
AU
Australia
Prior art keywords
memory array
ferroelectric memory
ferroelectric
array
memory
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003284565A
Inventor
Shigeki Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Institute of Advanced Industrial Science and Technology AIST filed Critical National Institute of Advanced Industrial Science and Technology AIST
Publication of AU2003284565A1 publication Critical patent/AU2003284565A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C11/00Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/22Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B51/00Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B51/00Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors
    • H10B51/10Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors characterised by the top-view layout
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B51/00Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors
    • H10B51/30Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory transistors characterised by the memory core region
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10BELECTRONIC MEMORY DEVICES
    • H10B53/00Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/01Manufacture or treatment
    • H10D30/021Manufacture or treatment of FETs having insulated gates [IGFET]
    • H10D30/0415Manufacture or treatment of FETs having insulated gates [IGFET] of FETs having ferroelectric gate insulators
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00Electrodes of devices having potential barriers
    • H10D64/01Manufacture or treatment
    • H10D64/031Manufacture or treatment of data-storage electrodes
    • H10D64/033Manufacture or treatment of data-storage electrodes comprising ferroelectric layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D89/00Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
    • H10D89/10Integrated device layouts

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
AU2003284565A 2002-11-20 2003-11-19 Ferroelectric memory array Abandoned AU2003284565A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002336253A JP2004172355A (en) 2002-11-20 2002-11-20 Ferroelectric memory array
JP2002-336253 2002-11-20
PCT/JP2003/014704 WO2004047176A1 (en) 2002-11-20 2003-11-19 Ferroelectric memory array

Publications (1)

Publication Number Publication Date
AU2003284565A1 true AU2003284565A1 (en) 2004-06-15

Family

ID=32321800

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003284565A Abandoned AU2003284565A1 (en) 2002-11-20 2003-11-19 Ferroelectric memory array

Country Status (3)

Country Link
JP (1) JP2004172355A (en)
AU (1) AU2003284565A1 (en)
WO (1) WO2004047176A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4511539B2 (en) 2004-08-16 2010-07-28 富士通セミコンダクター株式会社 Nonvolatile semiconductor memory
JP7248966B2 (en) 2016-07-06 2023-03-30 国立研究開発法人産業技術総合研究所 Semiconductor memory element, electric wiring, optical wiring, ferroelectric gate transistor, manufacturing method of electronic circuit, memory cell array and manufacturing method thereof
WO2018008609A1 (en) * 2016-07-06 2018-01-11 国立研究開発法人産業技術総合研究所 Semiconductor storage element, other elements, and method for manufacturing same

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63279496A (en) * 1987-05-12 1988-11-16 Citizen Watch Co Ltd Semiconductor non-volatile memory
JPH04352354A (en) * 1991-05-29 1992-12-07 Nec Corp Lsi component of wsi chip
JP3465397B2 (en) * 1995-01-26 2003-11-10 ソニー株式会社 Semiconductor nonvolatile memory device
CN1260733C (en) * 1997-11-14 2006-06-21 罗姆股份有限公司 Semiconductor memory and method for accessing semiconductor memory
JP2002009255A (en) * 2000-06-19 2002-01-11 Matsushita Electric Ind Co Ltd Non-volatile semiconductor storage device
JP2002329843A (en) * 2001-04-26 2002-11-15 Canon Inc Ferroelectric transistor type nonvolatile memory element and method of manufacturing the same

Also Published As

Publication number Publication date
JP2004172355A (en) 2004-06-17
WO2004047176A1 (en) 2004-06-03

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase