[go: up one dir, main page]

AU2003212763A1 - An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece - Google Patents

An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece

Info

Publication number
AU2003212763A1
AU2003212763A1 AU2003212763A AU2003212763A AU2003212763A1 AU 2003212763 A1 AU2003212763 A1 AU 2003212763A1 AU 2003212763 A AU2003212763 A AU 2003212763A AU 2003212763 A AU2003212763 A AU 2003212763A AU 2003212763 A1 AU2003212763 A1 AU 2003212763A1
Authority
AU
Australia
Prior art keywords
adressing
pattering
microelements
slm
moveable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003212763A
Inventor
Peter Duerr
Ulric Ljungblad
Torbjorn Sandstrom
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Micronic Laser Systems AB
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Micronic Laser Systems AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV, Micronic Laser Systems AB filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Publication of AU2003212763A1 publication Critical patent/AU2003212763A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AU2003212763A 2002-03-15 2003-03-14 An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece Abandoned AU2003212763A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE0200788A SE0200788D0 (en) 2002-03-15 2002-03-15 Method using a movable micro-element
SE0200788-8 2002-03-15
PCT/SE2003/000428 WO2003079091A1 (en) 2002-03-15 2003-03-14 An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece

Publications (1)

Publication Number Publication Date
AU2003212763A1 true AU2003212763A1 (en) 2003-09-29

Family

ID=20287277

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003212763A Abandoned AU2003212763A1 (en) 2002-03-15 2003-03-14 An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece

Country Status (3)

Country Link
AU (1) AU2003212763A1 (en)
SE (1) SE0200788D0 (en)
WO (1) WO2003079091A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE0100336L (en) 2001-02-05 2002-08-06 Micronic Laser Systems Ab Addressing method and apparatus using the same technical area
US7023526B2 (en) 2003-09-30 2006-04-04 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap without an explicit attenuation
US7410736B2 (en) 2003-09-30 2008-08-12 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system not utilizing overlap of the exposure zones
US6876440B1 (en) 2003-09-30 2005-04-05 Asml Holding N.V. Methods and systems to compensate for a stitching disturbance of a printed pattern in a maskless lithography system utilizing overlap of exposure zones with attenuation of the aerial image in the overlap region
US10831018B2 (en) 2017-12-08 2020-11-10 Texas Instruments Incorporated Methods and apparatus for increasing efficiency and optical bandwidth of a microelectromechanical system piston-mode spatial light modulator

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5212582A (en) * 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
US5285196A (en) * 1992-10-15 1994-02-08 Texas Instruments Incorporated Bistable DMD addressing method
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6312134B1 (en) * 1996-07-25 2001-11-06 Anvik Corporation Seamless, maskless lithography system using spatial light modulator
US5771116A (en) * 1996-10-21 1998-06-23 Texas Instruments Incorporated Multiple bias level reset waveform for enhanced DMD control
US6266178B1 (en) * 1998-12-28 2001-07-24 Texas Instruments Incorporated Guardring DRAM cell

Also Published As

Publication number Publication date
WO2003079091A1 (en) 2003-09-25
SE0200788D0 (en) 2002-03-15

Similar Documents

Publication Publication Date Title
AU2003219976A1 (en) Method for assembling nano objects
AU2003284940A1 (en) Laminate and method used for applying a design to a substrate
AU2003275940A1 (en) A method for assessment of particles
AU2003243897A1 (en) Method for constructing patterns in a layered manner
EP1510848B8 (en) Spatial light modulator using an integrated circuit actuator and method of making and using same
AU2003241245A1 (en) Method for transferring a pattern
AU2003210602A1 (en) Apparatus for moving a pair of opposing surfaces in response to an electrical activation
AU2003205988A1 (en) Method and system for generating caricaturized talking heads
AU2003277074A1 (en) System and method for performing simultaneous precision die bond of photonic components onto a single substrate
AU2003243230A1 (en) System and method for direct laser engraving of images onto a printing substrate
AU2003275400A1 (en) Apparatus and method for applying siftproof adhesive pattern
AU2003212763A1 (en) An adressing method of moveable microelements in a spatial light modulator (slm) for pattering of a workpiece
AU2003239323A1 (en) Method and apparatus for enabling a quick repeat feature
AU2003239450A1 (en) Articles and methods for applying color on surfaces
AU2002316468A1 (en) Apparatus and method for applying an elongate member to a substrate
AU2003264748A1 (en) Method and apparatus for applying powder in a pattern to a substrate
AU2001288465A1 (en) Method and apparatus for impressing a master pattern to a gel image
AU2003900034A0 (en) Method and apparatus for applying a film
AU2003218038A1 (en) Method and apparatus for applying glue to boxes
AU2003298395A1 (en) Method for simulating a die-stamping process
AU2003273503A1 (en) An oaslm and a method and apparatus for driving an oaslm
AU2003272577A1 (en) Method for creating a sculpture
AU2003243118A1 (en) A method and a stamp for transferring a pattern to a substrate
AU2003283009A1 (en) Method for producing structured surfaces
AU2003283358A1 (en) Method for producing holographic recording materials and said holographic recording materials

Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase