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AU2001285480A1 - Web based tool control in a semiconductor fabrication facility - Google Patents

Web based tool control in a semiconductor fabrication facility

Info

Publication number
AU2001285480A1
AU2001285480A1 AU2001285480A AU8548001A AU2001285480A1 AU 2001285480 A1 AU2001285480 A1 AU 2001285480A1 AU 2001285480 A AU2001285480 A AU 2001285480A AU 8548001 A AU8548001 A AU 8548001A AU 2001285480 A1 AU2001285480 A1 AU 2001285480A1
Authority
AU
Australia
Prior art keywords
semiconductor fabrication
web based
tool control
fabrication facility
based tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001285480A
Inventor
Mitchell Weiss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
PRI Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PRI Automation Inc filed Critical PRI Automation Inc
Publication of AU2001285480A1 publication Critical patent/AU2001285480A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/408—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by data handling or data format, e.g. reading, buffering or conversion of data
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
    • H04L43/00—Arrangements for monitoring or testing data switching networks
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
    • H04L69/00—Network arrangements, protocols or services independent of the application payload and not provided for in the other groups of this subclass
    • H04L69/08—Protocols for interworking; Protocol conversion
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32126—Hyperlink, access to program modules and to hardware modules in www, web server, browser
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/33—Director till display
    • G05B2219/33149—Publisher subscriber, publisher, master broadcasts data to slaves, subscriber
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35582—Control format in browser, use of xtml and xslt
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
    • H04L63/00—Network architectures or network communication protocols for network security
    • H04L63/02—Network architectures or network communication protocols for network security for separating internal from external traffic, e.g. firewalls

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Computer Security & Cryptography (AREA)
  • General Factory Administration (AREA)
  • Information Transfer Between Computers (AREA)
AU2001285480A 2000-08-23 2001-08-23 Web based tool control in a semiconductor fabrication facility Abandoned AU2001285480A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US22740800P 2000-08-23 2000-08-23
US60227408 2000-08-23
PCT/US2001/041851 WO2002017150A1 (en) 2000-08-23 2001-08-23 Web based tool control in a semiconductor fabrication facility

Publications (1)

Publication Number Publication Date
AU2001285480A1 true AU2001285480A1 (en) 2002-03-04

Family

ID=22852991

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001285480A Abandoned AU2001285480A1 (en) 2000-08-23 2001-08-23 Web based tool control in a semiconductor fabrication facility

Country Status (3)

Country Link
US (1) US6711731B2 (en)
AU (1) AU2001285480A1 (en)
WO (1) WO2002017150A1 (en)

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Also Published As

Publication number Publication date
US20020095644A1 (en) 2002-07-18
US6711731B2 (en) 2004-03-23
WO2002017150A1 (en) 2002-02-28

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