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AU2001273538A1 - Electrode apparatus and method for plasma processing - Google Patents

Electrode apparatus and method for plasma processing

Info

Publication number
AU2001273538A1
AU2001273538A1 AU2001273538A AU7353801A AU2001273538A1 AU 2001273538 A1 AU2001273538 A1 AU 2001273538A1 AU 2001273538 A AU2001273538 A AU 2001273538A AU 7353801 A AU7353801 A AU 7353801A AU 2001273538 A1 AU2001273538 A1 AU 2001273538A1
Authority
AU
Australia
Prior art keywords
plasma processing
electrode apparatus
electrode
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001273538A
Inventor
Steven T. Fink
Wayne L. Johnson
Murray D. Sirkis
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2001273538A1 publication Critical patent/AU2001273538A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/3255—Material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32605—Removable or replaceable electrodes or electrode systems

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Cleaning In General (AREA)
AU2001273538A 2000-07-20 2001-07-19 Electrode apparatus and method for plasma processing Abandoned AU2001273538A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US21945300P 2000-07-20 2000-07-20
US60219453 2000-07-20
PCT/US2001/022510 WO2002008486A2 (en) 2000-07-20 2001-07-19 Electrode apparatus and method for plasma processing

Publications (1)

Publication Number Publication Date
AU2001273538A1 true AU2001273538A1 (en) 2002-02-05

Family

ID=22819317

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001273538A Abandoned AU2001273538A1 (en) 2000-07-20 2001-07-19 Electrode apparatus and method for plasma processing

Country Status (2)

Country Link
AU (1) AU2001273538A1 (en)
WO (1) WO2002008486A2 (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3379437D1 (en) * 1982-05-21 1989-04-20 Tegal Corp Plasma reactor removeable insert
US5074456A (en) * 1990-09-18 1991-12-24 Lam Research Corporation Composite electrode for plasma processes
US5569356A (en) * 1995-05-19 1996-10-29 Lam Research Corporation Electrode clamping assembly and method for assembly and use thereof
US6073577A (en) * 1998-06-30 2000-06-13 Lam Research Corporation Electrode for plasma processes and method for manufacture and use thereof

Also Published As

Publication number Publication date
WO2002008486A3 (en) 2002-06-20
WO2002008486A2 (en) 2002-01-31

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