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AU1332601A - Strategic method for process control - Google Patents

Strategic method for process control

Info

Publication number
AU1332601A
AU1332601A AU13326/01A AU1332601A AU1332601A AU 1332601 A AU1332601 A AU 1332601A AU 13326/01 A AU13326/01 A AU 13326/01A AU 1332601 A AU1332601 A AU 1332601A AU 1332601 A AU1332601 A AU 1332601A
Authority
AU
Australia
Prior art keywords
process control
strategic method
strategic
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU13326/01A
Inventor
Joseph Fisher
Arnold J Goldman
Jehuda Hartman
Shlomo Sarel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Insyst Ltd
Original Assignee
Insyst Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from IL13266399A external-priority patent/IL132663A/en
Priority claimed from US09/633,824 external-priority patent/US7461040B1/en
Application filed by Insyst Ltd filed Critical Insyst Ltd
Publication of AU1332601A publication Critical patent/AU1332601A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B15/00—Systems controlled by a computer
    • G05B15/02—Systems controlled by a computer electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32345—Of interconnection of cells, subsystems, distributed simulation
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Management, Administration, Business Operations System, And Electronic Commerce (AREA)
AU13326/01A 1999-10-31 2000-10-13 Strategic method for process control Abandoned AU1332601A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
IL132663 1999-10-31
IL13266399A IL132663A (en) 1999-10-31 1999-10-31 Knowledge-engineering protocol-suite
US09/588,681 US6952688B1 (en) 1999-10-31 2000-06-07 Knowledge-engineering protocol-suite
US09588681 2000-06-07
US09633824 2000-08-07
US09/633,824 US7461040B1 (en) 1999-10-31 2000-08-07 Strategic method for process control
PCT/US2000/028318 WO2001033277A1 (en) 1999-10-31 2000-10-13 Strategic method for process control

Publications (1)

Publication Number Publication Date
AU1332601A true AU1332601A (en) 2001-05-14

Family

ID=27271918

Family Applications (1)

Application Number Title Priority Date Filing Date
AU13326/01A Abandoned AU1332601A (en) 1999-10-31 2000-10-13 Strategic method for process control

Country Status (3)

Country Link
EP (1) EP1234204A1 (en)
AU (1) AU1332601A (en)
WO (1) WO2001033277A1 (en)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7069101B1 (en) 1999-07-29 2006-06-27 Applied Materials, Inc. Computer integrated manufacturing techniques
US7188142B2 (en) 2000-11-30 2007-03-06 Applied Materials, Inc. Dynamic subject information generation in message services of distributed object systems in a semiconductor assembly line facility
US6913938B2 (en) 2001-06-19 2005-07-05 Applied Materials, Inc. Feedback control of plasma-enhanced chemical vapor deposition processes
US7160739B2 (en) 2001-06-19 2007-01-09 Applied Materials, Inc. Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
US7101799B2 (en) 2001-06-19 2006-09-05 Applied Materials, Inc. Feedforward and feedback control for conditioning of chemical mechanical polishing pad
US7082345B2 (en) 2001-06-19 2006-07-25 Applied Materials, Inc. Method, system and medium for process control for the matching of tools, chambers and/or other semiconductor-related entities
US7201936B2 (en) 2001-06-19 2007-04-10 Applied Materials, Inc. Method of feedback control of sub-atmospheric chemical vapor deposition processes
US6910947B2 (en) 2001-06-19 2005-06-28 Applied Materials, Inc. Control of chemical mechanical polishing pad conditioner directional velocity to improve pad life
US7047099B2 (en) 2001-06-19 2006-05-16 Applied Materials Inc. Integrating tool, module, and fab level control
US7337019B2 (en) 2001-07-16 2008-02-26 Applied Materials, Inc. Integration of fault detection with run-to-run control
US6984198B2 (en) 2001-08-14 2006-01-10 Applied Materials, Inc. Experiment management system, method and medium
US7225047B2 (en) 2002-03-19 2007-05-29 Applied Materials, Inc. Method, system and medium for controlling semiconductor wafer processes using critical dimension measurements
WO2003088067A1 (en) 2002-04-10 2003-10-23 Kendro Laboratory Products, Lp Data-centric automation
KR20050026099A (en) 2002-08-01 2005-03-14 어플라이드 머티어리얼즈 인코포레이티드 Method, system, and medium for handling misrepresentative metrology data within an advanced process control system
CN1720490B (en) 2002-11-15 2010-12-08 应用材料有限公司 Method and system for controlling manufacture process having multivariate input parameters
US7333871B2 (en) 2003-01-21 2008-02-19 Applied Materials, Inc. Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
US7205228B2 (en) 2003-06-03 2007-04-17 Applied Materials, Inc. Selective metal encapsulation schemes
US7354332B2 (en) 2003-08-04 2008-04-08 Applied Materials, Inc. Technique for process-qualifying a semiconductor manufacturing tool using metrology data
US7356377B2 (en) 2004-01-29 2008-04-08 Applied Materials, Inc. System, method, and medium for monitoring performance of an advanced process control system
US7444197B2 (en) 2004-05-06 2008-10-28 Smp Logic Systems Llc Methods, systems, and software program for validation and monitoring of pharmaceutical manufacturing processes
US7799273B2 (en) 2004-05-06 2010-09-21 Smp Logic Systems Llc Manufacturing execution system for validation, quality and risk assessment and monitoring of pharmaceutical manufacturing processes
US6961626B1 (en) 2004-05-28 2005-11-01 Applied Materials, Inc Dynamic offset and feedback threshold
US7096085B2 (en) 2004-05-28 2006-08-22 Applied Materials Process control by distinguishing a white noise component of a process variance
EP1932116A2 (en) * 2005-08-26 2008-06-18 Camtek Ltd. Method and system for automatic defect detection of articles in visual inspection machines
CN109063218B (en) * 2018-10-29 2025-03-07 洪启集成电路(珠海)有限公司 A statistical process control method and system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6112126A (en) * 1997-02-21 2000-08-29 Baker Hughes Incorporated Adaptive object-oriented optimization software system
US6122555A (en) * 1997-05-05 2000-09-19 Honeywell International Inc. System and methods for globally optimizing a process facility

Also Published As

Publication number Publication date
EP1234204A1 (en) 2002-08-28
WO2001033277A1 (en) 2001-05-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase