[go: up one dir, main page]

ATE404341T1 - DEVICE AND METHOD FOR SEPARATING AND TRANSPORTING SUBSTRATES - Google Patents

DEVICE AND METHOD FOR SEPARATING AND TRANSPORTING SUBSTRATES

Info

Publication number
ATE404341T1
ATE404341T1 AT06026054T AT06026054T ATE404341T1 AT E404341 T1 ATE404341 T1 AT E404341T1 AT 06026054 T AT06026054 T AT 06026054T AT 06026054 T AT06026054 T AT 06026054T AT E404341 T1 ATE404341 T1 AT E404341T1
Authority
AT
Austria
Prior art keywords
substrate
separating
support device
transporting
substrates
Prior art date
Application number
AT06026054T
Other languages
German (de)
Inventor
Richard Herter
Konrad Kaltenbach
Original Assignee
Rena Sondermaschinen Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rena Sondermaschinen Gmbh filed Critical Rena Sondermaschinen Gmbh
Application granted granted Critical
Publication of ATE404341T1 publication Critical patent/ATE404341T1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
    • B28D5/0088—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being angularly adjustable

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)

Abstract

The device has a support device (104) arranged within a fluid, where an individual substrate (102) is arranged in transverse direction (105) sequentially staying behind one another in form of a stack of the substrate. A removing device (107) is for separating and transporting of the substrate. The removing device has a gripper (108) with units, where the substrate is held and is drive away from the support device. A flow device (117) for fan out of a part of a stack substrate (103), and a contact pressure element (122) that counteracts the fan out substrates. An independent claim is also included for a method for fanning out, separating and transporting disk-shaped formed substrates, which involves arranging a support device within a fluid.
AT06026054T 2006-12-15 2006-12-15 DEVICE AND METHOD FOR SEPARATING AND TRANSPORTING SUBSTRATES ATE404341T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP06026054A EP1935599B1 (en) 2006-12-15 2006-12-15 Device and method for the separation and the transport of substrates

Publications (1)

Publication Number Publication Date
ATE404341T1 true ATE404341T1 (en) 2008-08-15

Family

ID=37946339

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06026054T ATE404341T1 (en) 2006-12-15 2006-12-15 DEVICE AND METHOD FOR SEPARATING AND TRANSPORTING SUBSTRATES

Country Status (6)

Country Link
EP (1) EP1935599B1 (en)
AT (1) ATE404341T1 (en)
DE (1) DE502006001352D1 (en)
ES (1) ES2313535T3 (en)
PL (1) PL1935599T3 (en)
TW (1) TW200842014A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5388862B2 (en) * 2006-12-19 2014-01-15 アールイーシー・ウェーハ・ピーティーイー・リミテッド Method and apparatus for separating silicon wafers
TW201128681A (en) * 2009-11-30 2011-08-16 Amb App & Maschb Gmbh Separation device
DE102012221452A1 (en) 2012-07-20 2014-01-23 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Device for separating wafers
CN115626488B (en) * 2022-09-08 2024-11-29 安徽兰迪节能玻璃有限公司 A vacuum glass production line taking device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5950643A (en) * 1995-09-06 1999-09-14 Miyazaki; Takeshiro Wafer processing system
DE19900671C2 (en) * 1999-01-11 2002-04-25 Fraunhofer Ges Forschung Method and device for separating disk-shaped substrates, in particular for wafer production
DE19904834A1 (en) * 1999-02-07 2000-08-10 Acr Automation In Cleanroom Mechanism for detaching, separating, and storing thin, fragile disc-shaped substrates for solar cells etc. manufacture
DE19950068B4 (en) * 1999-10-16 2006-03-02 Schmid Technology Systems Gmbh Method and device for separating and detaching substrate disks
DE102005045583A1 (en) * 2005-05-20 2006-11-23 Brain, Bernhard Method for separating stacked, disk-shaped elements and separating device

Also Published As

Publication number Publication date
TW200842014A (en) 2008-11-01
EP1935599B1 (en) 2008-08-13
PL1935599T3 (en) 2009-01-30
ES2313535T3 (en) 2009-03-01
DE502006001352D1 (en) 2008-09-25
EP1935599A1 (en) 2008-06-25

Similar Documents

Publication Publication Date Title
ATE467462T1 (en) DEVICE, SYSTEM AND METHOD FOR THE SURFACE TREATMENT OF SUBSTRATES
TW200802554A (en) A method of manufacturing a semiconductor device and device of processing substrate
ATE406235T1 (en) PRODUCTION LINE FOR FLEXIBLE PROCESSING OF WORKPIECES
SG115843A1 (en) Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer
ATE532207T1 (en) DEVICE AND METHOD FOR WET CHEMICAL PROCESSING OF FLAT, THIN SUBSTRATES IN A CONTINUOUS PROCESS
ATE468602T1 (en) DEVICE FOR ETCHING WAFERS BY SINGLE WAFER METHOD AND METHOD FOR ETCHING INDIVIDUAL WAFERS
DE502006008686D1 (en) Device for positioning and position preservation of
MY142184A (en) Method and apparatus for transporting a substrate using non-newtonian fluid
ATE468185T1 (en) SEPARATION DEVICE
RU2007132534A (en) WALL WITH FILM WITH FILM COOLING AND METHOD FOR ITS PRODUCTION
DE602008002919D1 (en) LIQUID DETERGENT STRUCTURE AND METHOD FOR HE
ATE424362T1 (en) METHOD AND DEVICE FOR DEPALLETIZING STACKED BOXES
ATE439321T1 (en) DEVICE FOR CONVEYING AND SORTING TABLETS
ATE404341T1 (en) DEVICE AND METHOD FOR SEPARATING AND TRANSPORTING SUBSTRATES
DE602005014315D1 (en) Device for handling bows
EP1876634A3 (en) A semiconductor substrate processing method and apparatus
WO2009074297A3 (en) Apparatus for, and method of, cleaning articles
WO2009078121A1 (en) Semiconductor substrate supporting jig and method for manufacturing the same
DE502006001130D1 (en) Handling device and method for handling workpieces
ATE469748T1 (en) FEEDING DEVICE FOR FLAT SUBSTRATES, INJECTION MOLDING APPARATUS AND METHOD FOR FEEDING FLAT SUBSTRATES
ATE467564T1 (en) METHOD AND DEVICE FOR CREATING A SERIES OF FLAT OBJECTS
ATE486031T1 (en) DEVICE AND METHOD FOR THE EVEN TRANSPORT OF SUBSTRATES
ATE385980T1 (en) DEVICE AND METHOD FOR SEPARATING PRINTING PLATES IN A STACK
DE502007000560D1 (en) Device for separating two disc-shaped elements arranged on one another during removal
ATE483660T1 (en) DEVICE FOR SEPARATING PIECE GOODS

Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee