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ATE367650T1 - Prüfverbinder mit anisotroper leitfähigkeit - Google Patents

Prüfverbinder mit anisotroper leitfähigkeit

Info

Publication number
ATE367650T1
ATE367650T1 AT03784570T AT03784570T ATE367650T1 AT E367650 T1 ATE367650 T1 AT E367650T1 AT 03784570 T AT03784570 T AT 03784570T AT 03784570 T AT03784570 T AT 03784570T AT E367650 T1 ATE367650 T1 AT E367650T1
Authority
AT
Austria
Prior art keywords
connection
conductive
conductive parts
parts
total number
Prior art date
Application number
AT03784570T
Other languages
English (en)
Inventor
Ryoji Setaka
Masaya Naoi
Katsumi Sato
Original Assignee
Jsr Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jsr Corp filed Critical Jsr Corp
Application granted granted Critical
Publication of ATE367650T1 publication Critical patent/ATE367650T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02Contact members
    • H01R13/22Contacts for co-operating by abutting
    • H01R13/24Contacts for co-operating by abutting resilient; resiliently-mounted
    • H01R13/2407Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
    • H01R13/2414Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/06711Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06755Material aspects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07314Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889Interfaces, e.g. between probe and tester
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01RELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R12/00Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
    • H01R12/70Coupling devices
    • H01R12/71Coupling devices for rigid printing circuits or like structures
    • H01R12/712Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
    • H01R12/714Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Non-Insulated Conductors (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
AT03784570T 2002-08-09 2003-08-07 Prüfverbinder mit anisotroper leitfähigkeit ATE367650T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002232558 2002-08-09

Publications (1)

Publication Number Publication Date
ATE367650T1 true ATE367650T1 (de) 2007-08-15

Family

ID=31711837

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03784570T ATE367650T1 (de) 2002-08-09 2003-08-07 Prüfverbinder mit anisotroper leitfähigkeit

Country Status (8)

Country Link
US (1) US7095241B2 (de)
EP (1) EP1553623B1 (de)
KR (1) KR100715751B1 (de)
CN (1) CN100413045C (de)
AT (1) ATE367650T1 (de)
AU (1) AU2003254855A1 (de)
DE (1) DE60315059T2 (de)
WO (1) WO2004015762A1 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004086565A1 (ja) * 2003-03-26 2004-10-07 Jsr Corporation 異方導電性コネクターおよび導電性ペースト組成物、プローブ部材並びにウエハ検査装置およびウエハ検査方法
US8518304B1 (en) 2003-03-31 2013-08-27 The Research Foundation Of State University Of New York Nano-structure enhancements for anisotropic conductive material and thermal interposers
TWI239684B (en) * 2003-04-16 2005-09-11 Jsr Corp Anisotropic conductive connector and electric inspection device for circuit device
US7446545B2 (en) * 2003-05-08 2008-11-04 Unitechno Inc. Anisotropically conductive sheet
KR101167750B1 (ko) * 2004-10-29 2012-07-23 제이에스알 가부시끼가이샤 웨이퍼 검사용 탐침 부재, 웨이퍼 검사용 프로브 카드 및웨이퍼 검사 장치
WO2006051845A1 (ja) * 2004-11-12 2006-05-18 Jsr Corporation ウエハ検査用探針部材、ウエハ検査用プローブカードおよびウエハ検査装置
JP4353171B2 (ja) * 2005-02-02 2009-10-28 セイコーエプソン株式会社 電子機器、光学パネル、検査プローブ、光学パネルの検査装置、光学パネルの検査方法
JP4577109B2 (ja) * 2005-06-20 2010-11-10 パナソニック株式会社 タッチパネル及びその製造方法
DE102006059429A1 (de) * 2006-12-15 2008-06-26 Atg Luther & Maelzer Gmbh Modul für eine Prüfvorrichtung zum Testen von Leiterplatten
US8410808B2 (en) * 2007-03-30 2013-04-02 Jsr Corporation Anisotropic conductive connector, probe member and wafer inspection system
KR100886712B1 (ko) * 2007-07-27 2009-03-04 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
KR100787407B1 (ko) * 2007-08-14 2007-12-21 주식회사 파이컴 전기 검사 장치 및 그 제조 방법
US8872038B2 (en) * 2009-09-02 2014-10-28 Polymatech Co., Ltd. Anisotropic conductor, method of producing the same, and anisotropic conductor-arranged sheet
JP6374642B2 (ja) * 2012-11-28 2018-08-15 株式会社日本マイクロニクス プローブカード及び検査装置
CN105527472B (zh) * 2014-10-17 2018-10-02 株式会社Isc 测试座
CN106568993B (zh) * 2015-10-09 2019-07-30 苍南县三维电子塑胶有限公司 可编程的显示面板检测用探针结构及检测系统
KR101785428B1 (ko) * 2016-04-21 2017-10-16 (주) 마이크로프랜드 반도체소자 테스트소켓
JP2018073577A (ja) * 2016-10-27 2018-05-10 株式会社エンプラス 異方導電性シート及びその製造方法
US10684930B2 (en) 2017-11-30 2020-06-16 International Business Machines Corporation Functional testing of high-speed serial links
CN108461387B (zh) * 2018-03-19 2020-06-19 北京北方华创微电子装备有限公司 功率馈入机构、旋转基座装置及半导体加工设备
US12021322B2 (en) * 2018-10-11 2024-06-25 Sekisui Polymatech Co., Ltd. Electrical connection sheet and terminal-equipped glass plate structure
KR102075669B1 (ko) * 2018-10-26 2020-02-10 오재숙 신호 전송 커넥터 및 그 제조방법
CN112924844A (zh) * 2019-12-06 2021-06-08 迪科特测试科技(苏州)有限公司 探测装置

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2794296B2 (ja) * 1988-08-10 1998-09-03 エヌオーケー株式会社 成形品
JP2737647B2 (ja) 1994-03-10 1998-04-08 カシオ計算機株式会社 異方導電性接着剤およびそれを用いた導電接続構造
JPH1140224A (ja) * 1997-07-11 1999-02-12 Jsr Corp 異方導電性シート
TW561266B (en) * 1999-09-17 2003-11-11 Jsr Corp Anisotropic conductive sheet, its manufacturing method, and connector
JP4240724B2 (ja) * 2000-01-26 2009-03-18 Jsr株式会社 異方導電性シートおよびコネクター
DE10011806A1 (de) * 2000-03-10 2001-09-13 Fr Luerssen Werft Gmbh & Co Abgasanlage für Wasserfahrzeuge
JP3541777B2 (ja) 2000-03-15 2004-07-14 ソニーケミカル株式会社 異方性導電接続材料
CN1230944C (zh) * 2000-08-09 2005-12-07 Jsr株式会社 各向异性导电板
KR100509526B1 (ko) * 2000-09-25 2005-08-23 제이에스알 가부시끼가이샤 이방 도전성 시트 및 그의 제조 방법 및 그의 응용 제품
JP4734706B2 (ja) * 2000-11-01 2011-07-27 Jsr株式会社 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法
WO2002047149A1 (fr) * 2000-12-08 2002-06-13 Jsr Corporation Feuille conductrice anisotrope et dispositif de controle de plaquettes
JP3543765B2 (ja) 2000-12-28 2004-07-21 Jsr株式会社 ウエハ検査用プローブ装置
KR100577947B1 (ko) * 2001-02-09 2006-05-10 제이에스알 가부시끼가이샤 이방 도전성 커넥터 및 그 제조 방법 및 프로우브 부재

Also Published As

Publication number Publication date
AU2003254855A1 (en) 2004-02-25
EP1553623A1 (de) 2005-07-13
KR100715751B1 (ko) 2007-05-08
DE60315059D1 (de) 2007-08-30
US20060043983A1 (en) 2006-03-02
US7095241B2 (en) 2006-08-22
DE60315059T2 (de) 2008-04-17
KR20050027252A (ko) 2005-03-18
EP1553623A4 (de) 2006-05-24
WO2004015762A1 (ja) 2004-02-19
EP1553623B1 (de) 2007-07-18
CN1675755A (zh) 2005-09-28
CN100413045C (zh) 2008-08-20

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Legal Events

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