ATE367650T1 - Prüfverbinder mit anisotroper leitfähigkeit - Google Patents
Prüfverbinder mit anisotroper leitfähigkeitInfo
- Publication number
- ATE367650T1 ATE367650T1 AT03784570T AT03784570T ATE367650T1 AT E367650 T1 ATE367650 T1 AT E367650T1 AT 03784570 T AT03784570 T AT 03784570T AT 03784570 T AT03784570 T AT 03784570T AT E367650 T1 ATE367650 T1 AT E367650T1
- Authority
- AT
- Austria
- Prior art keywords
- connection
- conductive
- conductive parts
- parts
- total number
- Prior art date
Links
- 230000000977 initiatory effect Effects 0.000 abstract 1
- 230000000717 retained effect Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/22—Contacts for co-operating by abutting
- H01R13/24—Contacts for co-operating by abutting resilient; resiliently-mounted
- H01R13/2407—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means
- H01R13/2414—Contacts for co-operating by abutting resilient; resiliently-mounted characterized by the resilient means conductive elastomers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
- G01R1/06755—Material aspects
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R12/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, specially adapted for printed circuits, e.g. printed circuit boards [PCB], flat or ribbon cables, or like generally planar structures, e.g. terminal strips, terminal blocks; Coupling devices specially adapted for printed circuits, flat or ribbon cables, or like generally planar structures; Terminals specially adapted for contact with, or insertion into, printed circuits, flat or ribbon cables, or like generally planar structures
- H01R12/70—Coupling devices
- H01R12/71—Coupling devices for rigid printing circuits or like structures
- H01R12/712—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit
- H01R12/714—Coupling devices for rigid printing circuits or like structures co-operating with the surface of the printed circuit or with a coupling device exclusively provided on the surface of the printed circuit with contacts abutting directly the printed circuit; Button contacts therefore provided on the printed circuit
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
- Non-Insulated Conductors (AREA)
- Electron Sources, Ion Sources (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002232558 | 2002-08-09 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE367650T1 true ATE367650T1 (de) | 2007-08-15 |
Family
ID=31711837
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03784570T ATE367650T1 (de) | 2002-08-09 | 2003-08-07 | Prüfverbinder mit anisotroper leitfähigkeit |
Country Status (8)
Country | Link |
---|---|
US (1) | US7095241B2 (de) |
EP (1) | EP1553623B1 (de) |
KR (1) | KR100715751B1 (de) |
CN (1) | CN100413045C (de) |
AT (1) | ATE367650T1 (de) |
AU (1) | AU2003254855A1 (de) |
DE (1) | DE60315059T2 (de) |
WO (1) | WO2004015762A1 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004086565A1 (ja) * | 2003-03-26 | 2004-10-07 | Jsr Corporation | 異方導電性コネクターおよび導電性ペースト組成物、プローブ部材並びにウエハ検査装置およびウエハ検査方法 |
US8518304B1 (en) | 2003-03-31 | 2013-08-27 | The Research Foundation Of State University Of New York | Nano-structure enhancements for anisotropic conductive material and thermal interposers |
TWI239684B (en) * | 2003-04-16 | 2005-09-11 | Jsr Corp | Anisotropic conductive connector and electric inspection device for circuit device |
US7446545B2 (en) * | 2003-05-08 | 2008-11-04 | Unitechno Inc. | Anisotropically conductive sheet |
KR101167750B1 (ko) * | 2004-10-29 | 2012-07-23 | 제이에스알 가부시끼가이샤 | 웨이퍼 검사용 탐침 부재, 웨이퍼 검사용 프로브 카드 및웨이퍼 검사 장치 |
WO2006051845A1 (ja) * | 2004-11-12 | 2006-05-18 | Jsr Corporation | ウエハ検査用探針部材、ウエハ検査用プローブカードおよびウエハ検査装置 |
JP4353171B2 (ja) * | 2005-02-02 | 2009-10-28 | セイコーエプソン株式会社 | 電子機器、光学パネル、検査プローブ、光学パネルの検査装置、光学パネルの検査方法 |
JP4577109B2 (ja) * | 2005-06-20 | 2010-11-10 | パナソニック株式会社 | タッチパネル及びその製造方法 |
DE102006059429A1 (de) * | 2006-12-15 | 2008-06-26 | Atg Luther & Maelzer Gmbh | Modul für eine Prüfvorrichtung zum Testen von Leiterplatten |
US8410808B2 (en) * | 2007-03-30 | 2013-04-02 | Jsr Corporation | Anisotropic conductive connector, probe member and wafer inspection system |
KR100886712B1 (ko) * | 2007-07-27 | 2009-03-04 | 주식회사 하이닉스반도체 | 반도체 패키지 및 이의 제조 방법 |
KR100787407B1 (ko) * | 2007-08-14 | 2007-12-21 | 주식회사 파이컴 | 전기 검사 장치 및 그 제조 방법 |
US8872038B2 (en) * | 2009-09-02 | 2014-10-28 | Polymatech Co., Ltd. | Anisotropic conductor, method of producing the same, and anisotropic conductor-arranged sheet |
JP6374642B2 (ja) * | 2012-11-28 | 2018-08-15 | 株式会社日本マイクロニクス | プローブカード及び検査装置 |
CN105527472B (zh) * | 2014-10-17 | 2018-10-02 | 株式会社Isc | 测试座 |
CN106568993B (zh) * | 2015-10-09 | 2019-07-30 | 苍南县三维电子塑胶有限公司 | 可编程的显示面板检测用探针结构及检测系统 |
KR101785428B1 (ko) * | 2016-04-21 | 2017-10-16 | (주) 마이크로프랜드 | 반도체소자 테스트소켓 |
JP2018073577A (ja) * | 2016-10-27 | 2018-05-10 | 株式会社エンプラス | 異方導電性シート及びその製造方法 |
US10684930B2 (en) | 2017-11-30 | 2020-06-16 | International Business Machines Corporation | Functional testing of high-speed serial links |
CN108461387B (zh) * | 2018-03-19 | 2020-06-19 | 北京北方华创微电子装备有限公司 | 功率馈入机构、旋转基座装置及半导体加工设备 |
US12021322B2 (en) * | 2018-10-11 | 2024-06-25 | Sekisui Polymatech Co., Ltd. | Electrical connection sheet and terminal-equipped glass plate structure |
KR102075669B1 (ko) * | 2018-10-26 | 2020-02-10 | 오재숙 | 신호 전송 커넥터 및 그 제조방법 |
CN112924844A (zh) * | 2019-12-06 | 2021-06-08 | 迪科特测试科技(苏州)有限公司 | 探测装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2794296B2 (ja) * | 1988-08-10 | 1998-09-03 | エヌオーケー株式会社 | 成形品 |
JP2737647B2 (ja) | 1994-03-10 | 1998-04-08 | カシオ計算機株式会社 | 異方導電性接着剤およびそれを用いた導電接続構造 |
JPH1140224A (ja) * | 1997-07-11 | 1999-02-12 | Jsr Corp | 異方導電性シート |
TW561266B (en) * | 1999-09-17 | 2003-11-11 | Jsr Corp | Anisotropic conductive sheet, its manufacturing method, and connector |
JP4240724B2 (ja) * | 2000-01-26 | 2009-03-18 | Jsr株式会社 | 異方導電性シートおよびコネクター |
DE10011806A1 (de) * | 2000-03-10 | 2001-09-13 | Fr Luerssen Werft Gmbh & Co | Abgasanlage für Wasserfahrzeuge |
JP3541777B2 (ja) | 2000-03-15 | 2004-07-14 | ソニーケミカル株式会社 | 異方性導電接続材料 |
CN1230944C (zh) * | 2000-08-09 | 2005-12-07 | Jsr株式会社 | 各向异性导电板 |
KR100509526B1 (ko) * | 2000-09-25 | 2005-08-23 | 제이에스알 가부시끼가이샤 | 이방 도전성 시트 및 그의 제조 방법 및 그의 응용 제품 |
JP4734706B2 (ja) * | 2000-11-01 | 2011-07-27 | Jsr株式会社 | 電気抵抗測定用コネクター並びに回路基板の電気抵抗測定装置および測定方法 |
WO2002047149A1 (fr) * | 2000-12-08 | 2002-06-13 | Jsr Corporation | Feuille conductrice anisotrope et dispositif de controle de plaquettes |
JP3543765B2 (ja) | 2000-12-28 | 2004-07-21 | Jsr株式会社 | ウエハ検査用プローブ装置 |
KR100577947B1 (ko) * | 2001-02-09 | 2006-05-10 | 제이에스알 가부시끼가이샤 | 이방 도전성 커넥터 및 그 제조 방법 및 프로우브 부재 |
-
2003
- 2003-08-07 DE DE60315059T patent/DE60315059T2/de not_active Expired - Lifetime
- 2003-08-07 AT AT03784570T patent/ATE367650T1/de not_active IP Right Cessation
- 2003-08-07 EP EP03784570A patent/EP1553623B1/de not_active Expired - Lifetime
- 2003-08-07 CN CNB038189100A patent/CN100413045C/zh not_active Expired - Fee Related
- 2003-08-07 KR KR1020057001117A patent/KR100715751B1/ko not_active Expired - Fee Related
- 2003-08-07 WO PCT/JP2003/010057 patent/WO2004015762A1/ja active IP Right Grant
- 2003-08-07 AU AU2003254855A patent/AU2003254855A1/en not_active Abandoned
- 2003-08-07 US US10/522,537 patent/US7095241B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
AU2003254855A1 (en) | 2004-02-25 |
EP1553623A1 (de) | 2005-07-13 |
KR100715751B1 (ko) | 2007-05-08 |
DE60315059D1 (de) | 2007-08-30 |
US20060043983A1 (en) | 2006-03-02 |
US7095241B2 (en) | 2006-08-22 |
DE60315059T2 (de) | 2008-04-17 |
KR20050027252A (ko) | 2005-03-18 |
EP1553623A4 (de) | 2006-05-24 |
WO2004015762A1 (ja) | 2004-02-19 |
EP1553623B1 (de) | 2007-07-18 |
CN1675755A (zh) | 2005-09-28 |
CN100413045C (zh) | 2008-08-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE367650T1 (de) | Prüfverbinder mit anisotroper leitfähigkeit | |
EP2731226A3 (de) | Stromversorgungssystem | |
PT1188170E (pt) | Estruturas de condutancia variavel | |
BRPI0508773A (pt) | conector elétrico e alojamento de conector elétrico | |
Palakodeti et al. | Influence of frequency and prestrain on the mechanical efficiency of dielectric electroactive polymer actuators | |
ATE370503T1 (de) | Polymerzusammensetzung | |
ATE421759T1 (de) | Elektrisch leitfähige zusammensetzung und methode zu deren herstellung | |
WO2004053431A3 (en) | Transducer and electronic device | |
ATE448585T1 (de) | Elektrische verbindungsvorrichtung | |
DE60314164D1 (de) | Prüfverbinder mit anisotroper leitfähigkeit | |
CY1113878T1 (el) | Ενας ηλεκτρικος συνδετηρας | |
EP0773560A3 (de) | Elektronische Vorrichtung mit einem Thermistor-Element | |
EP1936743A3 (de) | Doppelanschluss-Schraubstecker für eine elektrische Vorrichtung | |
ATE549770T1 (de) | Untersuchungsgeräte für eine schaltungseinrichtung mit anisotropem leitfähigen verbinder | |
TW200511468A (en) | Anisotropic conductive connector, probe member, wafer-inspecting device, and wafer-inspecting | |
BRPI0514046A (pt) | estrutura de eletrodo de resistência variável | |
MXPA04009993A (es) | Composicion conductora de ptc que contiene un auxiliar de procesamiento de polietileno de bajo peso molecular. | |
WO2007082125A3 (en) | Method and apparatus for measurement of electrical resistance | |
WO2004015786A3 (en) | Electrical and electro-mechanical applications of superconducting phenomena in carbon nanotubes | |
EP1780554A3 (de) | Nanostrukturiertes magnetoresistives Netzwerk und entsprechendes Verfahren zur Magnetfelddetektion | |
DE502006003284D1 (de) | Elektrischer steckverbinder mit vorgespannten kontaktlamellen | |
MY134053A (en) | Detection device in which output varies with amount by which elastically deformable contact element is pressed | |
EP1940207A3 (de) | Elektrische Vorrichtung mit einem Trägerelement mit zumindest einer speziellen Anschlussfläche und einem oberflächenmontierten Bauelement | |
ATE519826T1 (de) | Elektronische vorrichtung enthaltend ein thermisches zwischenlagematerial | |
DE60308894D1 (de) | Elektrischer Kontakt mit elastischer Rückstellvorrichtung und elektrischer Verbindungsteil mit mindestens einem solchen Kontakt |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |