[go: up one dir, main page]

ATE350580T1 - ELECTROSTATIC ACTUATED PUMP ARRAY - Google Patents

ELECTROSTATIC ACTUATED PUMP ARRAY

Info

Publication number
ATE350580T1
ATE350580T1 AT98965368T AT98965368T ATE350580T1 AT E350580 T1 ATE350580 T1 AT E350580T1 AT 98965368 T AT98965368 T AT 98965368T AT 98965368 T AT98965368 T AT 98965368T AT E350580 T1 ATE350580 T1 AT E350580T1
Authority
AT
Austria
Prior art keywords
diaphragm
electrodes
cell
fluid
mesopump
Prior art date
Application number
AT98965368T
Other languages
German (de)
Inventor
Cleopatra Cabuz
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Application granted granted Critical
Publication of ATE350580T1 publication Critical patent/ATE350580T1/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/043Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Saccharide Compounds (AREA)
  • Steroid Compounds (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Seal Device For Vehicle (AREA)
  • Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)

Abstract

A mesopump having a plurality of elementary cells, a process for making the same, and a method of pumping fluids using the mesopump. The cells each have a body forming a cavity having upper and lower electrodes with curved surfaces facing the other electrode. Electrical connections selectively energize the electrodes. A bistable diaphragm is mounted with its major portion located in the cavity between the electrodes so that the diaphragm deflects toward the upper or lower surfaces to conform thereto. A lateral conduit is located at at least one end of the body for fluid communication with the cavity. The lateral conduits are operably connected to a portion of the diaphragm mounted in the body and are opened and closed by movement of the diaphragm. A vertical conduit on at least one curved surface controls flow of fluid by movement of the diaphragm into and out of contact with the vertical conduit. The cells are interconnected to form the mesopump whereby activation of the electrodes causes movement of the diaphragm between the electrodes to move fluid into and out of the body. The preferred mesopump includes sets of three cell groups so that fluid enters a first cell from a source of fluid, is expelled to a second cell through a vertical conduit; expelled via a lateral conduit to a third cell, and expelled therefrom, whereby fluid passes from cell to cell upon activation of the electrodes.
AT98965368T 1998-11-06 1998-11-06 ELECTROSTATIC ACTUATED PUMP ARRAY ATE350580T1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1998/023658 WO2000028215A1 (en) 1998-11-06 1998-11-06 Electrostatically actuated pumping array

Publications (1)

Publication Number Publication Date
ATE350580T1 true ATE350580T1 (en) 2007-01-15

Family

ID=22268244

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98965368T ATE350580T1 (en) 1998-11-06 1998-11-06 ELECTROSTATIC ACTUATED PUMP ARRAY

Country Status (7)

Country Link
EP (1) EP1163446B1 (en)
CN (1) CN1327132C (en)
AT (1) ATE350580T1 (en)
CA (1) CA2350076C (en)
DE (1) DE69836836T2 (en)
HK (1) HK1046945B (en)
WO (1) WO2000028215A1 (en)

Families Citing this family (58)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6568286B1 (en) 2000-06-02 2003-05-27 Honeywell International Inc. 3D array of integrated cells for the sampling and detection of air bound chemical and biological species
US7420659B1 (en) 2000-06-02 2008-09-02 Honeywell Interantional Inc. Flow control system of a cartridge
US6729856B2 (en) 2001-10-09 2004-05-04 Honeywell International Inc. Electrostatically actuated pump with elastic restoring forces
US6637476B2 (en) 2002-04-01 2003-10-28 Protedyne Corporation Robotically manipulable sample handling tool
DE10302304B3 (en) 2003-01-22 2004-01-29 Festo Ag & Co. Electronic microvalve and method for its operation
US7249529B2 (en) 2003-03-28 2007-07-31 Protedyne Corporation Robotically manipulable sample handling tool
US6991213B2 (en) * 2003-12-30 2006-01-31 Honeywell International Inc. Dual diaphragm valve
US7100453B2 (en) 2003-12-30 2006-09-05 Honeywell International Inc. Modified dual diaphragm pressure sensor
CN104819119A (en) 2004-12-14 2015-08-05 麦德医像公司 Actuator pump system
US7222639B2 (en) 2004-12-29 2007-05-29 Honeywell International Inc. Electrostatically actuated gas valve
US7328882B2 (en) 2005-01-06 2008-02-12 Honeywell International Inc. Microfluidic modulating valve
US7445017B2 (en) 2005-01-28 2008-11-04 Honeywell International Inc. Mesovalve modulator
US7517201B2 (en) 2005-07-14 2009-04-14 Honeywell International Inc. Asymmetric dual diaphragm pump
US7353747B2 (en) * 2005-07-28 2008-04-08 Ethicon Endo-Surgery, Inc. Electroactive polymer-based pump
US7624755B2 (en) 2005-12-09 2009-12-01 Honeywell International Inc. Gas valve with overtravel
US7523762B2 (en) 2006-03-22 2009-04-28 Honeywell International Inc. Modulating gas valves and systems
JP2009543902A (en) 2006-07-10 2009-12-10 メディパックス インコーポレイテッド Superelastic epoxy hydrogel
DE602006009405D1 (en) 2006-10-28 2009-11-05 Sensirion Holding Ag More cell pump
NL2000466C2 (en) * 2007-02-02 2008-08-05 Grood Johannes Petrus Wilhelmu Method and device for dispensing a liquid.
JP2011505520A (en) 2007-12-03 2011-02-24 メディパックス インコーポレイテッド Fluid metering device
EP2464868B1 (en) * 2009-08-11 2019-04-17 ProMinent GmbH Diaphragm machine
WO2011032011A1 (en) 2009-09-10 2011-03-17 Medipacs, Inc. Low profile actuator and improved method of caregiver controlled administration of therapeutics
US8556392B2 (en) 2009-11-24 2013-10-15 De Grood Innovations B.V. Method and device for dispensing a liquid
US9500186B2 (en) 2010-02-01 2016-11-22 Medipacs, Inc. High surface area polymer actuator with gas mitigating components
US9995486B2 (en) 2011-12-15 2018-06-12 Honeywell International Inc. Gas valve with high/low gas pressure detection
US9835265B2 (en) 2011-12-15 2017-12-05 Honeywell International Inc. Valve with actuator diagnostics
US8905063B2 (en) 2011-12-15 2014-12-09 Honeywell International Inc. Gas valve with fuel rate monitor
US8839815B2 (en) 2011-12-15 2014-09-23 Honeywell International Inc. Gas valve with electronic cycle counter
US8947242B2 (en) 2011-12-15 2015-02-03 Honeywell International Inc. Gas valve with valve leakage test
US8899264B2 (en) 2011-12-15 2014-12-02 Honeywell International Inc. Gas valve with electronic proof of closure system
US9851103B2 (en) 2011-12-15 2017-12-26 Honeywell International Inc. Gas valve with overpressure diagnostics
US9557059B2 (en) 2011-12-15 2017-01-31 Honeywell International Inc Gas valve with communication link
US9846440B2 (en) 2011-12-15 2017-12-19 Honeywell International Inc. Valve controller configured to estimate fuel comsumption
US9074770B2 (en) 2011-12-15 2015-07-07 Honeywell International Inc. Gas valve with electronic valve proving system
HK1206374A1 (en) 2012-03-14 2016-01-08 麦德医像公司 Smart polymer materials with excess reactive molecules
US10422531B2 (en) 2012-09-15 2019-09-24 Honeywell International Inc. System and approach for controlling a combustion chamber
US9234661B2 (en) 2012-09-15 2016-01-12 Honeywell International Inc. Burner control system
DE102013209866B4 (en) 2013-05-28 2021-11-04 Robert Bosch Gmbh Device with a predetermined fluid displacement
EP2868970B1 (en) 2013-10-29 2020-04-22 Honeywell Technologies Sarl Regulating device
US10024439B2 (en) 2013-12-16 2018-07-17 Honeywell International Inc. Valve over-travel mechanism
US9841122B2 (en) 2014-09-09 2017-12-12 Honeywell International Inc. Gas valve with electronic valve proving system
US9645584B2 (en) 2014-09-17 2017-05-09 Honeywell International Inc. Gas valve with electronic health monitoring
CN104358674A (en) * 2014-10-24 2015-02-18 安徽理工大学 Biplane oil driven micropump based on giant magnetostrictive film driver
CN105201796A (en) * 2015-10-29 2015-12-30 宁波大学 Piezoelectric peristaltic micropump
US10503181B2 (en) 2016-01-13 2019-12-10 Honeywell International Inc. Pressure regulator
JP6292359B2 (en) * 2016-02-01 2018-03-14 株式会社村田製作所 Gas control device
US10564062B2 (en) 2016-10-19 2020-02-18 Honeywell International Inc. Human-machine interface for gas valve
CN110168223B (en) * 2016-12-30 2021-09-07 皇家飞利浦有限公司 Electrostatic peristaltic pump and method of operation
WO2018169842A1 (en) 2017-03-13 2018-09-20 Marsh Stephen Alan Micro pump systems and processing techniques
TW201912248A (en) 2017-08-31 2019-04-01 研能科技股份有限公司 Gas transmitting device
US11073281B2 (en) 2017-12-29 2021-07-27 Honeywell International Inc. Closed-loop programming and control of a combustion appliance
DE102018207858B4 (en) * 2018-05-18 2021-06-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method and holding device for manufacturing a micropump with a mechanically preloaded diaphragm actuator
US10697815B2 (en) 2018-06-09 2020-06-30 Honeywell International Inc. System and methods for mitigating condensation in a sensor module
WO2020053485A1 (en) 2018-09-14 2020-03-19 Teknologian Tutkimuskeskus Vtt Oy Pressure sensor
CN109771740B (en) * 2019-03-01 2020-11-27 浙江师范大学 A pneumatic infusion device
DE102019004450B4 (en) * 2019-06-26 2024-03-14 Drägerwerk AG & Co. KGaA Micropump system and method for guiding a compressible fluid
CN113482893B (en) * 2021-06-10 2022-04-01 浙江大学 Flexible pump based on dielectric elastic material
CN115387986A (en) * 2022-09-21 2022-11-25 北京京东方技术开发有限公司 Odor release device, equipment and preparation method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB514815A (en) * 1938-06-08 1939-11-17 Nils Nilsen Straatveit Improvements connected with reciprocating compressors or pumps
DE3926066A1 (en) * 1989-08-07 1991-02-14 Ibm Deutschland MICROMECHANICAL COMPRESSOR CASCADE AND METHOD FOR INCREASING PRINTER AT EXTREMELY LOW WORKING PRESSURE
EP0518524B1 (en) * 1991-05-30 1996-09-04 Hitachi, Ltd. Valve and semiconductor fabricating equipment using the same

Also Published As

Publication number Publication date
HK1046945B (en) 2008-05-23
WO2000028215A1 (en) 2000-05-18
HK1046945A1 (en) 2003-01-30
CN1354823A (en) 2002-06-19
CN1327132C (en) 2007-07-18
EP1163446A1 (en) 2001-12-19
EP1163446B1 (en) 2007-01-03
DE69836836D1 (en) 2007-02-15
DE69836836T2 (en) 2007-06-28
CA2350076A1 (en) 2000-05-18
CA2350076C (en) 2008-12-30

Similar Documents

Publication Publication Date Title
ATE350580T1 (en) ELECTROSTATIC ACTUATED PUMP ARRAY
US5992820A (en) Flow control in microfluidics devices by controlled bubble formation
FR2438184A1 (en) FLUIDIC SWITCHING ASSEMBLY
ATE508485T1 (en) ELECTROCHMIC DEVICE WITH REACTIVE MICROCHANNELS
ATE62603T1 (en) SUCTION LIMITATION DEVICE.
ATE354025T1 (en) DOUBLE DIAPHRAGM PUMP
ATE294461T1 (en) BISTABLE MICRO DRIVE WITH COUPLED MEMBRANES
EP1819006A3 (en) Fuel cell unit, fuel cell block interconnection and method for manufacturing a fuel cell block interconnection
DE69912157D1 (en) DEVICE FOR FILLING ROOT CHANNELS OF A DEVITALIZED TOOTH
EP1758186A3 (en) Polymer electrolyte fuel cell
DE69703218D1 (en) General purpose valve
CN101354029A (en) Microfluidic pump with multi-channel active control capability
CN107123625B (en) Straight-through electrohydraulic power micropump
DE3860987D1 (en) CONTROL UNIT TO BE USED IN THE FLOW PATHS OF A PLANT FOR REFILLING GAS-SHAPED AND / OR LIQUID-GAS SHAPED PRESSURE MEDIA.
CN1099532C (en) Hydrostatic bearing device
ATE518022T1 (en) ELECTROLYSIS CELL WITH A GAS DIFFUSION ELECTRODE CONTROLLED UNDER CONTROLLED PRESSURE
WO2004102707A3 (en) Improvements in fuel utilisation in electrochemical fuel cells
CN217136300U (en) Load feedback jet pulse emitter and drip irrigation system
CN216415446U (en) Positive pressure feedback jet pulse water dropper and drip irrigation system
CN210506379U (en) Micro-fluidic chip
BR0012364A (en) Mechanical interface connection for vacuum ejectors and a modular assembly to supply negative pressure to an industrial process by means of at least one vacuum ejector driven by compressed air
US4441966A (en) Electroplating apparatus and method
CN216567506U (en) Jet oscillator water dropper and drip irrigation system
JPS6419184A (en) Piezoelectric type micro-pump
CN211735905U (en) Novel building engineering wall connection device

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties