ATE240589T1 - Verfahren zum herstellen von dünnschicht- solarzellen-modulen - Google Patents
Verfahren zum herstellen von dünnschicht- solarzellen-modulenInfo
- Publication number
- ATE240589T1 ATE240589T1 AT99120971T AT99120971T ATE240589T1 AT E240589 T1 ATE240589 T1 AT E240589T1 AT 99120971 T AT99120971 T AT 99120971T AT 99120971 T AT99120971 T AT 99120971T AT E240589 T1 ATE240589 T1 AT E240589T1
- Authority
- AT
- Austria
- Prior art keywords
- semiconductor layer
- electrode layer
- layer
- substrate
- thin film
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000010409 thin film Substances 0.000 title abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 9
- 239000000758 substrate Substances 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
- H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
- H10F71/1035—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials having multiple Group IV elements, e.g. SiGe or SiC
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
- H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
- H10F19/80—Encapsulations or containers for integrated devices, or assemblies of multiple devices, having photovoltaic cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/121—The active layers comprising only Group IV materials
- H10F71/1224—The active layers comprising only Group IV materials comprising microcrystalline silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/545—Microcrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S136/00—Batteries: thermoelectric and photoelectric
- Y10S136/29—Testing, calibrating, treating, e.g. aging
Landscapes
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8196199 | 1999-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE240589T1 true ATE240589T1 (de) | 2003-05-15 |
Family
ID=13761111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99120971T ATE240589T1 (de) | 1999-03-25 | 1999-11-04 | Verfahren zum herstellen von dünnschicht- solarzellen-modulen |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US6271053B1 (de) |
| EP (1) | EP1039554B1 (de) |
| AT (1) | ATE240589T1 (de) |
| DE (1) | DE69907866T2 (de) |
| ES (1) | ES2198833T3 (de) |
Families Citing this family (49)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1061589A3 (de) * | 1999-06-14 | 2008-08-06 | Kaneka Corporation | Herstellungsverfahren eines photovoltaischen Dünnschicht-Moduls |
| JP4036616B2 (ja) * | 2000-01-31 | 2008-01-23 | 三洋電機株式会社 | 太陽電池モジュール |
| JP4201241B2 (ja) * | 2001-05-17 | 2008-12-24 | 株式会社カネカ | 集積型薄膜光電変換モジュールの作製方法 |
| JP4162447B2 (ja) * | 2001-09-28 | 2008-10-08 | 三洋電機株式会社 | 光起電力素子及び光起電力装置 |
| US8431264B2 (en) | 2002-08-09 | 2013-04-30 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
| US8404376B2 (en) | 2002-08-09 | 2013-03-26 | Infinite Power Solutions, Inc. | Metal film encapsulation |
| US9793523B2 (en) | 2002-08-09 | 2017-10-17 | Sapurast Research Llc | Electrochemical apparatus with barrier layer protected substrate |
| US8021778B2 (en) | 2002-08-09 | 2011-09-20 | Infinite Power Solutions, Inc. | Electrochemical apparatus with barrier layer protected substrate |
| US8394522B2 (en) | 2002-08-09 | 2013-03-12 | Infinite Power Solutions, Inc. | Robust metal film encapsulation |
| US8445130B2 (en) | 2002-08-09 | 2013-05-21 | Infinite Power Solutions, Inc. | Hybrid thin-film battery |
| US20070264564A1 (en) | 2006-03-16 | 2007-11-15 | Infinite Power Solutions, Inc. | Thin film battery on an integrated circuit or circuit board and method thereof |
| US8236443B2 (en) | 2002-08-09 | 2012-08-07 | Infinite Power Solutions, Inc. | Metal film encapsulation |
| US8728285B2 (en) | 2003-05-23 | 2014-05-20 | Demaray, Llc | Transparent conductive oxides |
| US7888584B2 (en) * | 2003-08-29 | 2011-02-15 | Lyden Robert M | Solar cell, module, array, network, and power grid |
| US7959769B2 (en) | 2004-12-08 | 2011-06-14 | Infinite Power Solutions, Inc. | Deposition of LiCoO2 |
| KR101021536B1 (ko) | 2004-12-08 | 2011-03-16 | 섬모픽스, 인코포레이티드 | ＬｉＣｏＯ２의 증착 |
| KR101046813B1 (ko) * | 2006-09-08 | 2011-07-06 | 미츠비시 쥬고교 가부시키가이샤 | 태양 전지 패널 및 태양 전지 패널의 제조 방법 |
| WO2008039471A2 (en) | 2006-09-29 | 2008-04-03 | Infinite Power Solutions, Inc. | Masking of and material constraint for depositing battery layers on flexible substrates |
| US8197781B2 (en) | 2006-11-07 | 2012-06-12 | Infinite Power Solutions, Inc. | Sputtering target of Li3PO4 and method for producing same |
| US20080295882A1 (en) * | 2007-05-31 | 2008-12-04 | Thinsilicon Corporation | Photovoltaic device and method of manufacturing photovoltaic devices |
| TWI405340B (zh) * | 2007-08-31 | 2013-08-11 | Nexpower Technology Corp | 薄膜太陽能電池與其製作方法 |
| TWI441937B (zh) | 2007-12-21 | 2014-06-21 | Infinite Power Solutions Inc | 形成用於電解質薄膜之濺鍍靶材的方法 |
| US8268488B2 (en) | 2007-12-21 | 2012-09-18 | Infinite Power Solutions, Inc. | Thin film electrolyte for thin film batteries |
| US8518581B2 (en) | 2008-01-11 | 2013-08-27 | Inifinite Power Solutions, Inc. | Thin film encapsulation for thin film batteries and other devices |
| JP2009206279A (ja) * | 2008-02-27 | 2009-09-10 | Sharp Corp | 薄膜太陽電池およびその製造方法 |
| TWI440198B (zh) * | 2008-03-13 | 2014-06-01 | Nexpower Technology Corp | 薄膜疊層太陽能電池與其製作方法 |
| KR101672254B1 (ko) | 2008-04-02 | 2016-11-08 | 사푸라스트 리써치 엘엘씨 | 에너지 수확과 관련된 에너지 저장 장치를 위한 수동적인 과전압/부족전압 제어 및 보호 |
| TWI378565B (en) * | 2008-04-30 | 2012-12-01 | Nexpower Technology Corp | Stacked-layered thin film solar cell and manufacturing method thereof |
| DE112009001168T5 (de) * | 2008-05-15 | 2011-04-28 | ULVAC, Inc., Chigasaki-shi | Verfahren zur Herstellung eines Dünnfilmsolarbatteriemoduls sowie Dünnfilmsolarbatteriemodul |
| KR20110058793A (ko) | 2008-08-11 | 2011-06-01 | 인피니트 파워 솔루션스, 인크. | 전자기 에너지를 수확하기 위한 일체형 컬렉터 표면을 갖는 에너지 디바이스 및 전자기 에너지를 수확하는 방법 |
| WO2010022849A2 (de) * | 2008-09-01 | 2010-03-04 | Merck Patent Gmbh | Randentschichtung von dünnschicht-solar-modulen mittels ätzen |
| US8260203B2 (en) | 2008-09-12 | 2012-09-04 | Infinite Power Solutions, Inc. | Energy device with integral conductive surface for data communication via electromagnetic energy and method thereof |
| WO2010042594A1 (en) | 2008-10-08 | 2010-04-15 | Infinite Power Solutions, Inc. | Environmentally-powered wireless sensor module |
| US8298852B2 (en) * | 2008-12-29 | 2012-10-30 | Jusung Engineering Co., Ltd. | Thin film type solar cell and method for manufacturing the same |
| TWI387120B (zh) * | 2009-02-17 | 2013-02-21 | Nexpower Technology Corp | 薄膜疊層太陽能電池及其製作方法 |
| WO2010126699A2 (en) | 2009-04-29 | 2010-11-04 | Hunter Douglas Industries B.V. | Architectural panels with organic photovoltaic interlayers and methods of forming the same |
| WO2010144459A2 (en) * | 2009-06-10 | 2010-12-16 | Thinsilicon Corporation | Photovoltaic modules and methods for manufacturing photovoltaic modules having tandem semiconductor layer stacks |
| KR101792287B1 (ko) | 2009-09-01 | 2017-10-31 | 사푸라스트 리써치 엘엘씨 | 집적된 박막 배터리를 갖는 인쇄 회로 보드 |
| US20110300432A1 (en) | 2010-06-07 | 2011-12-08 | Snyder Shawn W | Rechargeable, High-Density Electrochemical Device |
| KR101251841B1 (ko) * | 2011-11-28 | 2013-04-09 | 엘지이노텍 주식회사 | 태양광 발전장치 및 이의 제조방법 |
| JP5694620B1 (ja) | 2013-05-29 | 2015-04-01 | 株式会社カネカ | 結晶シリコン系太陽電池の製造方法、および結晶シリコン系太陽電池モジュールの製造方法 |
| EP3396698A1 (de) | 2017-04-27 | 2018-10-31 | TRUMPF Hüttinger GmbH + Co. KG | Strommwandlungseinheit, plasmaverarbeitungsausrüstung und verfahren zur steuerung mehrerer plasmaprozesse |
| EP3396700A1 (de) | 2017-04-27 | 2018-10-31 | TRUMPF Hüttinger GmbH + Co. KG | Strommwandlungseinheit, plasmaverarbeitungsausrüstung und verfahren zur steuerung mehrerer plasmaprozesse |
| EP3396699A1 (de) | 2017-04-27 | 2018-10-31 | TRUMPF Hüttinger GmbH + Co. KG | Strommwandlungseinheit, plasmaverarbeitungsausrüstung und verfahren zur steuerung mehrerer plasmaprozesse |
| US10490682B2 (en) | 2018-03-14 | 2019-11-26 | National Mechanical Group Corp. | Frame-less encapsulated photo-voltaic solar panel supporting solar cell modules encapsulated within multiple layers of optically-transparent epoxy-resin materials |
| US10840707B2 (en) | 2018-08-06 | 2020-11-17 | Robert M. Lyden | Utility pole with solar modules and wireless device and method of retrofitting existing utility pole |
| US11207988B2 (en) | 2018-08-06 | 2021-12-28 | Robert M. Lyden | Electric or hybrid vehicle with wireless device and method of supplying electromagnetic energy to vehicle |
| US11588421B1 (en) | 2019-08-15 | 2023-02-21 | Robert M. Lyden | Receiver device of energy from the earth and its atmosphere |
| WO2024006962A2 (en) * | 2022-06-30 | 2024-01-04 | University Of Virginia Patent Foundation | Use of lasers to selectively remove materials from substrates |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4166918A (en) * | 1978-07-19 | 1979-09-04 | Rca Corporation | Method of removing the effects of electrical shorts and shunts created during the fabrication process of a solar cell |
| AU2042183A (en) | 1983-08-03 | 1985-02-07 | Energy Conversion Devices Inc. | Eliminating short circuits in photovoltaic devices |
| JPS60208869A (ja) | 1984-04-03 | 1985-10-21 | Matsushita Electric Ind Co Ltd | 光起電力素子の製造法 |
| JPS61156775A (ja) | 1984-12-28 | 1986-07-16 | Teijin Ltd | 非晶質シリコン太陽電池の分割加工方法 |
| JPS61198685A (ja) * | 1985-02-27 | 1986-09-03 | Kanegafuchi Chem Ind Co Ltd | 半導体装置の製法 |
| US4838950A (en) | 1988-04-22 | 1989-06-13 | Chronar Corp. | Stabilization of intraconnections and interfaces |
-
1999
- 1999-11-04 DE DE69907866T patent/DE69907866T2/de not_active Expired - Lifetime
- 1999-11-04 AT AT99120971T patent/ATE240589T1/de not_active IP Right Cessation
- 1999-11-04 EP EP99120971A patent/EP1039554B1/de not_active Expired - Lifetime
- 1999-11-04 US US09/433,905 patent/US6271053B1/en not_active Expired - Lifetime
- 1999-11-04 ES ES99120971T patent/ES2198833T3/es not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| EP1039554B1 (de) | 2003-05-14 |
| DE69907866D1 (de) | 2003-06-18 |
| ES2198833T3 (es) | 2004-02-01 |
| US6271053B1 (en) | 2001-08-07 |
| DE69907866T2 (de) | 2004-03-11 |
| EP1039554A1 (de) | 2000-09-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |