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ATE108518T1 - Doppel-membranpumpe. - Google Patents

Doppel-membranpumpe.

Info

Publication number
ATE108518T1
ATE108518T1 AT91115450T AT91115450T ATE108518T1 AT E108518 T1 ATE108518 T1 AT E108518T1 AT 91115450 T AT91115450 T AT 91115450T AT 91115450 T AT91115450 T AT 91115450T AT E108518 T1 ATE108518 T1 AT E108518T1
Authority
AT
Austria
Prior art keywords
slide valve
diaphragm pump
control slide
diaphragm
double diaphragm
Prior art date
Application number
AT91115450T
Other languages
English (en)
Inventor
Dirk Budde
Original Assignee
Almatec Tech Innovationen Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Almatec Tech Innovationen Gmbh filed Critical Almatec Tech Innovationen Gmbh
Application granted granted Critical
Publication of ATE108518T1 publication Critical patent/ATE108518T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F04B43/0736—Pumps having fluid drive the actuating fluid being controlled by at least one valve with two or more pumping chambers in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L25/00—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means
    • F01L25/08—Drive, or adjustment during the operation, or distribution or expansion valves by non-mechanical means by electric or magnetic means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86574—Supply and exhaust
    • Y10T137/86622—Motor-operated

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
AT91115450T 1990-10-08 1991-09-12 Doppel-membranpumpe. ATE108518T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4031872 1990-10-08
DE19914106180 DE4106180A1 (de) 1990-10-08 1991-02-27 Doppel-membranpumpe

Publications (1)

Publication Number Publication Date
ATE108518T1 true ATE108518T1 (de) 1994-07-15

Family

ID=25897542

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91115450T ATE108518T1 (de) 1990-10-08 1991-09-12 Doppel-membranpumpe.

Country Status (7)

Country Link
US (1) US5222876A (de)
EP (1) EP0480192B1 (de)
JP (1) JPH086693B2 (de)
AT (1) ATE108518T1 (de)
DE (1) DE4106180A1 (de)
DK (1) DK0480192T3 (de)
ES (1) ES2056543T3 (de)

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US5325762A (en) * 1992-10-29 1994-07-05 Nordson Corporation Fluid pressure operated piston engine assembly
DE4427981C1 (de) * 1994-08-08 1995-12-07 Huewel Ralf Hydraulisch oder pneumatisch betriebene Kolben- und/oder Membran-Pumpe
US5611678A (en) * 1995-04-20 1997-03-18 Wilden Pump & Engineering Co. Shaft seal arrangement for air driven diaphragm pumping systems
NL1001954C2 (nl) 1995-12-21 1997-06-24 Verder Holding B V Stuurklep en pomp voorzien van stuurklep.
TW539918B (en) * 1997-05-27 2003-07-01 Tokyo Electron Ltd Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process
DE19738779C2 (de) 1997-09-04 2003-06-12 Almatec Maschb Gmbh Umsteuersystem für eine druckgetriebene Membranpumpe
US6748960B1 (en) 1999-11-02 2004-06-15 Tokyo Electron Limited Apparatus for supercritical processing of multiple workpieces
JP5073902B2 (ja) * 1999-11-02 2012-11-14 東京エレクトロン株式会社 多数のワークピースを超臨界処理する方法及び装置
US6561774B2 (en) 2000-06-02 2003-05-13 Tokyo Electron Limited Dual diaphragm pump
JP4724353B2 (ja) * 2000-07-26 2011-07-13 東京エレクトロン株式会社 半導体基板のための高圧処理チャンバー
US7001468B1 (en) 2002-02-15 2006-02-21 Tokyo Electron Limited Pressure energized pressure vessel opening and closing device and method of providing therefor
WO2003071173A1 (en) * 2002-02-15 2003-08-28 Supercritical Systems Inc. Pressure enchanced diaphragm valve
US7387868B2 (en) 2002-03-04 2008-06-17 Tokyo Electron Limited Treatment of a dielectric layer using supercritical CO2
US6722642B1 (en) 2002-11-06 2004-04-20 Tokyo Electron Limited High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism
US7021635B2 (en) * 2003-02-06 2006-04-04 Tokyo Electron Limited Vacuum chuck utilizing sintered material and method of providing thereof
US7225820B2 (en) * 2003-02-10 2007-06-05 Tokyo Electron Limited High-pressure processing chamber for a semiconductor wafer
US7077917B2 (en) * 2003-02-10 2006-07-18 Tokyo Electric Limited High-pressure processing chamber for a semiconductor wafer
US7163380B2 (en) 2003-07-29 2007-01-16 Tokyo Electron Limited Control of fluid flow in the processing of an object with a fluid
US20050035514A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Vacuum chuck apparatus and method for holding a wafer during high pressure processing
US20050034660A1 (en) * 2003-08-11 2005-02-17 Supercritical Systems, Inc. Alignment means for chamber closure to reduce wear on surfaces
US20050067002A1 (en) * 2003-09-25 2005-03-31 Supercritical Systems, Inc. Processing chamber including a circulation loop integrally formed in a chamber housing
US7186093B2 (en) * 2004-10-05 2007-03-06 Tokyo Electron Limited Method and apparatus for cooling motor bearings of a high pressure pump
US7250374B2 (en) 2004-06-30 2007-07-31 Tokyo Electron Limited System and method for processing a substrate using supercritical carbon dioxide processing
US7307019B2 (en) 2004-09-29 2007-12-11 Tokyo Electron Limited Method for supercritical carbon dioxide processing of fluoro-carbon films
US7491036B2 (en) 2004-11-12 2009-02-17 Tokyo Electron Limited Method and system for cooling a pump
US20060135047A1 (en) * 2004-12-22 2006-06-22 Alexei Sheydayi Method and apparatus for clamping a substrate in a high pressure processing system
US7434590B2 (en) 2004-12-22 2008-10-14 Tokyo Electron Limited Method and apparatus for clamping a substrate in a high pressure processing system
US20060134332A1 (en) * 2004-12-22 2006-06-22 Darko Babic Precompressed coating of internal members in a supercritical fluid processing system
US7140393B2 (en) 2004-12-22 2006-11-28 Tokyo Electron Limited Non-contact shuttle valve for flow diversion in high pressure systems
US7291565B2 (en) 2005-02-15 2007-11-06 Tokyo Electron Limited Method and system for treating a substrate with a high pressure fluid using fluorosilicic acid
US7435447B2 (en) 2005-02-15 2008-10-14 Tokyo Electron Limited Method and system for determining flow conditions in a high pressure processing system
US7767145B2 (en) 2005-03-28 2010-08-03 Toyko Electron Limited High pressure fourier transform infrared cell
US7380984B2 (en) * 2005-03-28 2008-06-03 Tokyo Electron Limited Process flow thermocouple
US7494107B2 (en) 2005-03-30 2009-02-24 Supercritical Systems, Inc. Gate valve for plus-atmospheric pressure semiconductor process vessels
US7789971B2 (en) 2005-05-13 2010-09-07 Tokyo Electron Limited Treatment of substrate using functionalizing agent in supercritical carbon dioxide
US7524383B2 (en) 2005-05-25 2009-04-28 Tokyo Electron Limited Method and system for passivating a processing chamber
DE202010004957U1 (de) * 2010-04-12 2011-08-26 Timmer-Pneumatik Gmbh Fluid-Steuerventilsystem für eine Pumpensteuerung
US8622720B2 (en) * 2010-09-09 2014-01-07 Tom M. Simmons Reciprocating fluid pumps including magnets and related methods
IT201800004121A1 (it) * 2018-03-30 2019-09-30 Miro Capitanio Sistema valvolare antistallo bistabile
CA3128977A1 (en) * 2019-02-06 2020-08-13 Siemens Healthcare Diagnostics Inc. Liquid sensor assembly, apparatus, and methods
EP3730786B1 (de) * 2019-04-19 2022-12-28 White Knight Fluid Handling Inc. Hubkolbenfluidpumpen mit magneten sowie zugehörige anordnungen, systeme und verfahren
DE102021104548A1 (de) 2021-02-25 2022-08-25 Lutz Pumpen Gmbh Mehrfachmembranpumpe
US11746771B2 (en) * 2021-04-16 2023-09-05 Teryair Equipment Pvt. Ltd. Actuator valve of an air operated double diaphragm pump

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2811979A (en) * 1955-02-24 1957-11-05 Frank G Presnell Shuttle valve
US3001360A (en) * 1959-06-08 1961-09-26 New York Air Brake Co Engine starting system
US3203439A (en) * 1962-10-09 1965-08-31 Beckett Harcum Co Spool valve with magnetic hold
US3192865A (en) * 1963-09-10 1965-07-06 Francis J Klempay Hydraulically actuated pump
US3304126A (en) * 1965-02-15 1967-02-14 Gorman Rupp Co Material handling apparatus and methods
SE412939B (sv) * 1977-09-09 1980-03-24 Kaelle Eur Control Hydrauldriven deplacementpump serskilt for pumpning av tjocka och slitande medier
DE2925144A1 (de) * 1979-06-22 1981-01-22 Bruss Foerdertechnik Kg Doppelt wirkende membranpumpe
DE3112434A1 (de) * 1981-03-28 1982-10-07 Depa GmbH, 4000 Düsseldorf Druckluftgetriebene doppelmembran-pumpe
DE3150976A1 (de) * 1981-12-23 1983-06-30 DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf Druckluftgetriebene doppelmembranpumpe
DE3310131A1 (de) * 1983-03-21 1984-09-27 DEPA Gesellschaft für Verfahrenstechnik mbH, 4000 Düsseldorf Umsteuerventileinsatz fuer eine druckluftgetriebene doppelmembranpumpe
US4509402A (en) * 1983-06-08 1985-04-09 Economics Laboratory, Inc. Magnetic reversing mechanism
FR2553149B1 (fr) * 1983-10-07 1985-12-27 Lagrandiere Marc De Moteur a piston actionne hydrauliquement ou pneumatiquement et applications
US4889035A (en) * 1985-07-16 1989-12-26 Thermo Electron Web Systems, Inc. Magnetically actuated valve for cyclically operating piston-cylinder actuator
SE8801423D0 (sv) * 1988-04-18 1988-04-18 Dominator Ab Pneumatisk ventil for styrning av i synnerhet tryckluftdrivna membranpumpar
DE3900718A1 (de) * 1989-01-12 1990-07-26 Depa Ges Fuer Verfahrenstechni Verfahren und vorrichtung zur steuerung einer druckluftbetriebenen doppelmembranpumpe

Also Published As

Publication number Publication date
US5222876A (en) 1993-06-29
DE4106180A1 (de) 1992-04-09
DK0480192T3 (da) 1994-08-15
EP0480192B1 (de) 1994-07-13
DE4106180C2 (de) 1992-09-10
JPH086693B2 (ja) 1996-01-29
JPH04234582A (ja) 1992-08-24
EP0480192A1 (de) 1992-04-15
ES2056543T3 (es) 1994-10-01

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Legal Events

Date Code Title Description
EEIH Change in the person of patent owner
EELA Cancelled due to lapse of time