Wedge Surface Plasmon Polariton Waveguides Based on Wet-Bulk Micromachining
"> Figure 1
<p>Sketch of (<b>a</b>) the proposed wedge SPP waveguides with the sidewall corners α = 45°, 54.74°, and 90°, and(<b>b</b>) the cross-section geometry of the wedge SPP waveguide with the trapezoidal cross-section.</p> "> Figure 2
<p>(<b>a</b>–<b>d</b>) Schematic of the fabrication flow of the wedge SPP waveguides; (<b>e</b>–<b>f</b>) FESEM images of the trapezoidal-shaped silicon waveguides fabricated on the (100) SOI wafer by using a KOH etching solution.</p> "> Figure 3
<p>The normalized electric field distributions of the WPP modes on the cross–section of the wedge SPP waveguides for various sidewall corners: (<b>a</b>) α = 35.26°, (<b>b</b>) 45°, (<b>c</b>) 54.7° and(<b>d</b>) 90°; and (<b>e</b>) the distributions of the light intensity along the AA’ cut line.</p> "> Figure 4
<p>The electric field distribution of the fundamental propagation mode on the cross–section of a trapezoidal-shaped SPP waveguide: (<b>a</b>) <span class="html-italic">E<sub>y</sub></span> electric field component and (<b>b</b>) <span class="html-italic">E<sub>z</sub></span> electric field component.</p> "> Figure 5
<p>The propagation characteristics of the WPP mode at various sidewall corners: (<b>a</b>) effective mode index (<span class="html-italic">n<sub>eff</sub></span>), (<b>b</b>) effective mode area (<span class="html-italic">A<sub>eff</sub></span>), (<b>c</b>) propagation length (<span class="html-italic">L</span>) and (<b>d</b>) the figure of merit (<span class="html-italic">FoM</span>).</p> "> Figure 6
<p>The propagation characteristics of the WPP mode depending on the width of the top surface of the wedge SPP waveguide, for four typical values of the sidewall corner (α = 35.26°, 45<sup>o</sup>, 54.7° and 90°): (<b>a</b>) effective mode index (<span class="html-italic">n<sub>eff</sub></span>), (<b>b</b>) effective ode area (<span class="html-italic">A<sub>eff</sub></span>), (<b>c</b>) propagation length (<span class="html-italic">L</span>) and (<b>d</b>) the figure of merit (<span class="html-italic">FoM</span>).</p> "> Figure 7
<p>The propagation characteristics of the wedge-shaped SPP waveguide structure as a function of the height (<b>α</b> = 54.74°, <span class="html-italic">w</span> = 0 nm, 300 nm, and 1000 nm): (<b>a</b>) effective mode index (<span class="html-italic">n<sub>eff</sub></span>), (<b>b</b>) effective mode area (<span class="html-italic">A<sub>eff</sub></span>), (<b>c</b>) propagation length (<span class="html-italic">L</span>) and (<b>d</b>) the figure of merit (<span class="html-italic">FoM</span>).</p> "> Figure 8
<p>The influence of the refractive index of the dielectric medium on the propagation characteristics: (<b>a</b>) effective mode index (<span class="html-italic">n<sub>eff</sub></span>), (<b>b</b>) effective mode area (<span class="html-italic">A<sub>eff</sub></span>), (<b>c</b>) propagation length (<span class="html-italic">L</span>) and (<b>d</b>) the figure of merit (<span class="html-italic">FoM</span>).</p> ">
Abstract
:1. Introduction
2. Wedge SPP Waveguides and Model for Simulation
3. Propagation Mode of Wedge SP Waveguides
4. Modal Characteristics of Wedge SPP Waveguides
5. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Huong, N.T.; Chinh, N.V.; Hoang, C.M. Wedge Surface Plasmon Polariton Waveguides Based on Wet-Bulk Micromachining. Photonics 2019, 6, 21. https://doi.org/10.3390/photonics6010021
Huong NT, Chinh NV, Hoang CM. Wedge Surface Plasmon Polariton Waveguides Based on Wet-Bulk Micromachining. Photonics. 2019; 6(1):21. https://doi.org/10.3390/photonics6010021
Chicago/Turabian StyleHuong, Nguyen Thanh, Nguyen Van Chinh, and Chu Manh Hoang. 2019. "Wedge Surface Plasmon Polariton Waveguides Based on Wet-Bulk Micromachining" Photonics 6, no. 1: 21. https://doi.org/10.3390/photonics6010021