An Iterative High-Precision Algorithm for Multi-Beam Array Stitching Method Based on Scanning Hartmann
<p>Schematic diagrams of (<b>a</b>) multi-beam array measuring optical system and (<b>b</b>) the path covering the entire aperture in a multi-beam array scanning optical system.</p> "> Figure 2
<p>Iterative process flowchart.</p> "> Figure 3
<p>Schematic diagrams of (<b>a</b>) the simulation model of the optical system and (<b>b</b>) the aberrations in the simulation model of the optical system.</p> "> Figure 4
<p>Schematic diagrams of array scanning way with (<b>a</b>) non-overlapping, (<b>b</b>) partially overlapping (one column), (<b>c</b>) extensively overlapping (two columns), and (<b>d</b>) schematic diagrams of sampled points distribution. (The dashed line in figure represents the position of a multi-beam array system before the scanning movement, while the solid line represents the position after the movement. The red circles indicate beams undergoing repeated sampling. In (<b>d</b>), the green circle represents the optical system aperture (1 m), and the blue circle with red dots indicates the effective sampled points).</p> "> Figure 5
<p>In the first row, the reconstructed wavefront through the iterative method when the scanning step (<b>a</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>b</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>c</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c, respectively. In the second row, the residuals after subtracting the reconstructed wavefront distribution from the preset aberrations when the scanning step (<b>d</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>e</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>f</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c, respectively. In the third row, the curves depicting the convergence of aberration PV values and RMS values of the difference between the preset and the reconstructed when the scanning step (<b>g</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>h</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>i</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c, respectively.</p> "> Figure 5 Cont.
<p>In the first row, the reconstructed wavefront through the iterative method when the scanning step (<b>a</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>b</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>c</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c, respectively. In the second row, the residuals after subtracting the reconstructed wavefront distribution from the preset aberrations when the scanning step (<b>d</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>e</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>f</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c, respectively. In the third row, the curves depicting the convergence of aberration PV values and RMS values of the difference between the preset and the reconstructed when the scanning step (<b>g</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>h</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>i</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c, respectively.</p> "> Figure 6
<p>Distribution plots obtained by subtracting the preset aberrations from the reconstructed wavefront using the averaging method when the scanning step (<b>a</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>b</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>c</b>) refers to <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c, respectively.</p> "> Figure 7
<p>Comparison of the Zernike coefficients of aberrations with the iterative method and the averaging method, which are presented for different scanning steps, (<b>a</b>) referencing <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>b</b>) referencing <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>c</b>) referencing <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c.</p> "> Figure 7 Cont.
<p>Comparison of the Zernike coefficients of aberrations with the iterative method and the averaging method, which are presented for different scanning steps, (<b>a</b>) referencing <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>a, (<b>b</b>) referencing <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>b, and (<b>c</b>) referencing <a href="#applsci-14-00794-f004" class="html-fig">Figure 4</a>c.</p> "> Figure 8
<p>The setup for the wavefront calibration of the beams in the multi-beam array system.</p> "> Figure 9
<p>The setup for the alignment of multiple beams.</p> "> Figure 10
<p>Experimental setup of (<b>a</b>) multi-beam array and (<b>b</b>) MASTS.</p> "> Figure 11
<p>The reconstructed wavefront distributions of optical system (<b>a</b>) using interferometer data, (<b>b</b>) using iterative method with step size of 20 mm, (<b>c</b>) using iterative method with step size of 40 mm, (<b>d</b>) using averaging method with step size of 20 mm, (<b>e</b>) using averaging method with step size of 40 mm, (<b>f</b>) without correcting for multi-beam pointing error E and with step size of 20 mm, and (<b>g</b>) without correcting for multi-beam error E and with step size of 40 mm.</p> ">
Abstract
:1. Introduction
2. Methods
- Since D is ignored, E solved by Equation (6) is not accurate enough and can be represented as , as mentioned above. Then, the is subtracted from the original measurement data to obtain the data processed first.
- The data processed first are plugged into Equation (5) to solve for an approximate wavefront. With this approximate wavefront, the approximate is calculated, which represents the sub-aperture aberration signal. The is subtracted from the original measurement data to obtain the data processed second.
- The data processed second are plugged into Equation (6) to obtain a more accurate .
3. Simulations
4. Experiments
- Align the central beam (No. 5) of the multi-beam array with the optical system’s aperture center, which is used as the coordinate system origin. Determine coordinates for all measurement positions based on the optical system’s aperture size and the array scanning step size.
- Drive the multi-beam array along a two-dimensional guide to the positions determined in Step 1. Sequentially illuminate the beams according to their numerical order. Illuminate each beam for one second to stabilize spot images. Subsequently, the detector captures the image. After completing measurements at the current position, move the multi-beam array system to the next measurement position. Repeat Steps 1 and 2 until all positions within the optical system’s aperture are covered.
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
References
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Standard Zernike Terms | Coefficients |
---|---|
Z4 | −0.003 λ |
Z5 | 0.0155 λ |
Z6 | −0.0152 λ |
Z7 | −0.0124 λ |
Z8 | 0.0124 λ |
Z9 | 0.00 λ |
Z10 | 0.0122 λ |
Size of a Micro Lens | Micro Lens Focal Length | Micro Lens Array Resolution | CCD Pixel Size | Measurement Frame Rate |
---|---|---|---|---|
0.3 × 0.3 mm | 15 mm | 45 × 60 | 5.5 μm | 15 Hz |
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Yan, X.; Li, D.; E, K.; Feng, F.; Wang, T.; Xue, X.; Zhang, Z.; Lu, K. An Iterative High-Precision Algorithm for Multi-Beam Array Stitching Method Based on Scanning Hartmann. Appl. Sci. 2024, 14, 794. https://doi.org/10.3390/app14020794
Yan X, Li D, E K, Feng F, Wang T, Xue X, Zhang Z, Lu K. An Iterative High-Precision Algorithm for Multi-Beam Array Stitching Method Based on Scanning Hartmann. Applied Sciences. 2024; 14(2):794. https://doi.org/10.3390/app14020794
Chicago/Turabian StyleYan, Xiangyu, Dahai Li, Kewei E, Fang Feng, Tao Wang, Xun Xue, Zekun Zhang, and Kai Lu. 2024. "An Iterative High-Precision Algorithm for Multi-Beam Array Stitching Method Based on Scanning Hartmann" Applied Sciences 14, no. 2: 794. https://doi.org/10.3390/app14020794
APA StyleYan, X., Li, D., E, K., Feng, F., Wang, T., Xue, X., Zhang, Z., & Lu, K. (2024). An Iterative High-Precision Algorithm for Multi-Beam Array Stitching Method Based on Scanning Hartmann. Applied Sciences, 14(2), 794. https://doi.org/10.3390/app14020794