Extreme ultraviolet photon conversion efficiency of tetraphenyl butadiene

Joshua R. Graybill, Chandra B. Shahi, Michael A. Coplan, Alan K. Thompson, Robert E. Vest, and Charles W. Clark

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Joshua R. Graybill, Chandra B. Shahi, Michael A. Coplan, Alan K. Thompson, Robert E. Vest, and Charles W. Clark, "Extreme ultraviolet photon conversion efficiency of tetraphenyl butadiene," Appl. Opt. 59, 1217-1224 (2020)

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Abstract

Extreme ultraviolet (EUV) radiation can be converted to visible light using tetraphenyl butadiene (TPB) as a phosphor. 1 µm films of TPB were prepared using thermal vapor deposition of the pure material and by spin coating suspensions of TPB in high-molecular-weight polystyrene/toluene solutions. Calibrated sources and detectors were used to determine the effective photon conversion efficiency of the films for incident EUV radiation in the wavelength range of $125\;{\rm nm}\le\lambda\le 200\;{\rm nm}$. After exposure to atmosphere, the efficiency of the vapor-deposited films decreased significantly, while the efficiency of the spin-coated films remained unchanged. The production of TPB films by spin coating offers the advantages of simplicity and long-term stability.

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Sample	Mass Ratio	$t$ [µm]
1	$0.133 \pm 0.008$	$1.21 \pm 0.02$
2	$0.262 \pm 0.009$	$1.24 \pm 0.02$
3	$0.403 \pm 0.009$	$1.14 \pm 0.05$
4	$0.540 \pm 0.001$	$1.30 \pm 0.04$
5	$0.667 \pm 0.001$	$1.22 \pm 0.01$
6	$0.802 \pm 0.002$	$1.19 \pm 0.02$
7	-	$1.12 \pm 0.02$

Quantity	Units	V	Relative Uncertainty %
$I_{m o n}$	nA	0.203	0.91
$I_{s t d}$	nA	5.00	0.62
$η_{s t d}$	A/W	0.113	9.7
$I_{P M T}$	µA	1.00	1.2
$η_{P M T}$	A/W	$4.1 \times 10^{5}$	11
$Ω_{P M T}$	sr	0.029	7.8
$T_{E U V}$	-	0.7	17
$γ$	-	1.7	24

Sample	Mass Ratio	$t$ [µm]
1	$0.133 \pm 0.008$	$1.21 \pm 0.02$
2	$0.262 \pm 0.009$	$1.24 \pm 0.02$
3	$0.403 \pm 0.009$	$1.14 \pm 0.05$
4	$0.540 \pm 0.001$	$1.30 \pm 0.04$
5	$0.667 \pm 0.001$	$1.22 \pm 0.01$
6	$0.802 \pm 0.002$	$1.19 \pm 0.02$
7	-	$1.12 \pm 0.02$

Quantity	Units	V	Relative Uncertainty %
$I_{m o n}$	nA	0.203	0.91
$I_{s t d}$	nA	5.00	0.62
$η_{s t d}$	A/W	0.113	9.7
$I_{P M T}$	µA	1.00	1.2
$η_{P M T}$	A/W	$4.1 \times 10^{5}$	11
$Ω_{P M T}$	sr	0.029	7.8
$T_{E U V}$	-	0.7	17
$γ$	-	1.7	24

Extreme ultraviolet photon conversion efficiency of tetraphenyl butadiene

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Tables (2)

Equations (8)

Applied Optics