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HTT Probe Lap

Probe Lap® is a replacement for on-line lapping film, made with aluminum-oxide or silicon-carbide abrasive particles, suitable for various cleaning applications. It offers different temperature capabilities, with standard sheets operating from -50°C to 125°C, high temperature up to 150°C, and ultra temperature up to 200°C. The document includes specifications for various Probe Lap products, including dimensions and contact information for customer service.

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53 views2 pages

HTT Probe Lap

Probe Lap® is a replacement for on-line lapping film, made with aluminum-oxide or silicon-carbide abrasive particles, suitable for various cleaning applications. It offers different temperature capabilities, with standard sheets operating from -50°C to 125°C, high temperature up to 150°C, and ultra temperature up to 200°C. The document includes specifications for various Probe Lap products, including dimensions and contact information for customer service.

Uploaded by

kclua91
Copyright
© © All Rights Reserved
We take content rights seriously. If you suspect this is your content, claim it here.
Available Formats
Download as PDF, TXT or read online on Scribd
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MATERIALS SOLUTIONS | SPECIFICATION SHEET

Probe Lap ®

Probe Lap® is used as a direct replacement for on-line lapping film applications. It is built using aluminum-oxide or silicon-carbide
abrasive particles. The sheets can be mounted on various substrates and abrasion plates used for on-line and off-line probe
cleaning.

Standard Probe Lap cleaning wafers and cleaning sheets have an operating temperature range -50° to 125°C. With additional
processing, tempered Probe Lap high temperature capable cleaning wafers and cleaning sheets can be used at test temperatures
up to -50° to 150°C. Ultra temperature Probe Lap sheets and wafers have a maximum operating temperature of 200°C.

OPERATING TEMPERATURE
MATERIAL MATERIAL NOMINAL
MATERIAL DESIGNATION COLOR ABRASIVE -50°C 25°C 125°C 150°C 200°C

Probe Lap PL-xAH (AlO) Yellow 0.5 µm


(standard)
Purple 1 µm

Green 3 µm

PL-xSH (SiC) Light gray 1 µm

Dark gray 3 µm

Probe Lap PL-xAT (AlO) Yellow 0.5 µm


(high temperature)
Purple 1 µm

Green 3 µm

PL-xST (SiC) Light gray 1 µm

Dark gray 3 µm

Probe Lap PL-xAHT (AlO) Brown 1 µm


(ultra temperature)
3 µm

PL-xSHT (SiC) Gray 1 µm

3 µm

CROSS SECTION
—

Probe Lap 112 ± 12 µm


Abrasive Film (nominal)
Total Installed
Stack Height
Adhesive

Support Carrier
SPECIFICATIONS
—
CLEANING MATERIAL CONFIGURATION
Sheet 200 mm wafer 300 mm wafer Custom install

Support carrier 725 ± 20 µm 775 ± 20 µm Contact Entegris


(SEMI Standard) (SEMI Standard)

Total installed 112 ± 12 µm 837 ± 32 µm 887 ± 32 µm Contact Entegris


stack height

FOR MORE INFORMATION


Please call your Regional Customer Service Center today to learn what Entegris can do for you.
Visit entegris.com and select the Contact Us link to find the customer service center nearest you.

TERMS AND CONDITIONS OF SALE


All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit entegris.com and select the Terms & Conditions link in the footer.

Corporate Headquarters Customer Service


129 Concord Road Tel +1 952 556 4181
Billerica, MA 01821 Fax +1 952 556 8022
USA Toll Free 800 394 4083

Entegris®, the Entegris Rings Design®, and other product names are trademarks of Entegris, Inc. as listed
on entegris.com/trademarks. All third-party product names, logos, and company names are trademarks or
registered trademarks of their respective owners. Use of them does not imply any affiliation, sponsorship,
or endorsement by the trademark owner.
©2024 Entegris, Inc. | All rights reserved. | Printed in the USA | 9000-13458ENT-0224

www.entegris.com

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