Design Rules for CMOS
Design Rules
Stick Diagrams
Layout Diagram
Examples
Darshana Sankhe, DJSCOE
Design Rules: Introduction
Design rules are a set of geometrical specifications
that dictate the design of the layout
Layout is top view of a chip.
Design process are aided by stick diagram and layout
Stick diagram gives the placement of different
components and their connection details
But the dimensions of devices are not mentioned
Circuit design with all dimensions is Layout
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Design Rules: Introduction
Fabrication process needs different masks, these masks are
prepared from layout
Layout is an Interface between circuit designer and fabrication
engineer
Layout is made using a set of design rules.
Design rules allow translation of circuit (usually in stick diagram
or symbolic form) into actual geometry in silicon wafer
These rules usually specify the minimum allowable line widths for
physical objects on-chip
Example: metal, polysilicon, interconnects, diffusion areas,
minimum feature dimensions, and minimum allowable
separations between two such features.
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NEED FOR DESIGN RULES
Better area efficiency
Better yield
Better reliability
Increase the probability of fabricating a successful
product on Si wafer
If design rules are not followed:
Functional or non-functional circuit.
Design consuming larger Si area.
The device can fail during or after simulation.
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Colour Codes :
Layer Color Representation
N+ Active Green
P+ Active Yellow/Brown
PolySi Red
Metal 1 Blue
Metal 2 Magenta
Contact Black X
Buried contact Brown X
Via Black X
Implant Dotted yellow
Dotted
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N-Well Green/Black
Stick Diagrams :
A stick diagram is a symbolic representation of a layout.
In stick diagram, each conductive layer is represented by a
line of distinct color.
Width of line is not important, as stick diagrams just give
only wiring and routing information.
Does show all components/vias, relative placement.
Does not show exact placement, transistor sizes, wire
lengths, wire widths, tub boundaries.
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Stick Diagrams: Basic Rules
Poly crosses diffusion forms transistor
Red (poly) over Green(Active), gives a FET.
L:W
nFET/
nMOS
Aspect Ratio
L:W
pFET/pMOS
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Stick Diagrams (CMOS): Basic Steps
Normally, the first step is to draw two parallel metal (blue) VDD
and GND rails.
There should be enough space between them for other circuit
elements.
Draw Demarcation line (Brown) at center of VDD and GND rails.
This line represents the well (n/p-well).
Next, Active (Green/yellow) paths must be drawn for required
PU & PD transistors above & below DL.
Draw vertical poly crossing both diffusions (Green & yellow)
Remember, Poly (Red) crosses Active (Green/yellow), where
transistor is required.
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Stick Diagram (CMOS): Basic Steps
No Diffusion can cross demarcation line.
Only poly and metal can cross demarcation line
N-diffusion and p-diffusion are joined using a metal wire.
Place all PMOS above and NMOS below demarcation line.
Connect them using wires (metal).
Blue may cross over red or green, without connection.
Connection between layers is specified with X.
Metal lines on different layer can cross one another,
connections are done using via.
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Inverter Using MOSFET
Enhancement-Mode MOSFETs act as switches.
They are switched OFF, when the input to gate is
low.
So, they can be used to pull the output down.
Now, for pull-up, we can use a resistor.
But resistors consume larger area.
Another alternative is using MOSFET as pull-up.
PU’s can be NMOS or PMOS.
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Inverter Using MOSFET
Pull Up
Output
Pull Down
Input
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CMOS Invertor (Cicuit Diagram)
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CMOS Invertor (Stick Diagram)
VDD
------------------ DL
Out
In
GND
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CMOS INVERTER :
A
GND VDD
Y
p+ n+ n+ p+ p+ n+
n well
p substrate
substrate tap well tap
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Well Biasing :
The various N and P diffusions must be reverse
biased to ensure that those wells are insulated
from each other.
This requires that the N- wells are connected to
the most positive voltage, VDD.
The P- substrate must be connected to the most
negative voltage, ground.
This assumes that all other nets are at a voltage
between 0V and VDD.
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MOSFET
L
W N-type transistor
w
A silicon wafer
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Types of Layout Design Rules
Industry Standard: Micron Rule
λ Based Design Rules
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Types of Design Rules (Contd…)
Industry Standard: Micron Rule
All device dimensions are expressed in terms of
absolute dimension(μm/nm)
These rules will not support proportional scaling
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Types of Design Rules (Contd…)
λ Based Design Rules :
Developed by Mead and Conway.
All device dimensions are expresses in terms of a scalable
parameter λ.
λ = L/2; L = The minimum feature size of transistor
L=2λ
These rules support proportional scaling.
They should be applied carefully in sub-micron CMOS process.
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Design Rules
• Minimum length or width of a feature on a
layer is 2
• To allow for shape contraction
• Minimum separation of features on a layer
is 2
• To ensure adequate continuity of the
intervening materials.
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Design Rules :
Two Features on different mask layers can
be misaligned by a maximum of 2 on the
wafer.
If the overlap of these two different mask
layers can be catastrophic to the design,
they must be separated by at least 2
If the overlap is just undesirable, they
must be separated by at least
Darshana Sankhe, DJSCOE
Design Rules: CMOS
Line size and spacing:
metal1:
Minimum width=3, Minimum Spacing=3
metal2:
Minimum width=3, Minimum Spacing=4
poly:
Minimum width= 2, Minimum Spacing=2
ndiff/pdiff:
Minimum width= 3, Minimum Spacing=3,
wells:
minimum width=6,
minimum n-well/p-well space = 6( They are at same potential)
= 9 (They are at different potential)
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Design Rules: CMOS
Transistors:
Min width=3
Min length=2
Min poly overhang=2
Contacts (Vias)
Cut size: exactly 2 X 2
Cut separation: minimum 2
Overlap: min 1 in all directions
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Contact Cut :
Metal connects to polySi/diffusion by contact cut.
Contact area: 2*2
Metal and polySi or diffusion must overlap this
contact area by so that the two desired conductors
encompass the contact area despite any mis-
alignment between conducting layers and the contact
hole
4
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Contact Cut
Contact cut – contact cut: 2 apart
Why? To prevent holes from merging.
2
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Interlayer Contacts :
Interconnection between poly and diffusion is
done by contacts.
Metal contact
Butting contact
Buried contact
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Metal contact :
Contact cut of 2λ * 2λ
in oxide layer above
poly and diffusion
Metal used for
interconnection
Individual contact size
becomes 4λ * 4λ
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CMOS
Inverter:
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CMOS NAND
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CMOS NOR:
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Design of NMOS/CMOS Circuits:
PDN – The Function to be implemented, must be expressed
in a inverted form.
_________
F = (A + BC) D
F = (AB + C) (D + E)
__
F = A + B + CD
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F’ = A + B + CD
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Thank you
Darshana Sankhe, DJSCOE