MEMS Sensors for Biomedical Applications
Yu-Chong Tai Professor of EE Member of NSF/CNSE California Institute of Technology
(NSF/ERC Industry Day, May 16-17, 2001)
What is MEMS?
A Micro-Electro-Mechanical System (MEMS) is a batch-fabricated (microfabricated) system that contains both electrical and mechanical components with characteristic sizes ranging from nanometers to millimeters.
Other Names
In US: Microdynamics In Europe: Micro Systems (Technology) In Japan: Micromachines, MicroRobots
Machine Size
Quantity Micromachines (MEMS) Molecular (Nano) Machines Conventional Machines
nm
mm
km
Pressure Sensors
200 m
Nitride diaphragm
Poly strain gauges
Schlumberger Oil-Well Pressure Sensor
Polysilicon thermistor
4 nitride Diaphragms
0.65
output voltage (V)
0.6
0.55
10,000 2 psi design Multi-diaphragm configuration
0.5
0.45 0 1000 2000 3000 4000 5000
P ressu re (p si)
MEMS Pressure Sensor Probe for Intraocular Pressure Measurement
Wafer with flexible pressure sensor skins Flexible ribbon
Pressure sensor
Sensor Tip
Vacuum-Insulated Shear Stress Sensor
Polysilicon Wire (3 x 150 x 0.5 m3) Vacuum Cavity (200 x 200 x 2 m3)
Metal lead
Polysilicon wire Nitride diaphragm Vacuum cavity
Metal lead
Si substrate
Cross-section Photograph
Successful Test on NASAF 15
Shear-stress Sensor Imager
1 cm
2.86 cm
Shear Stress (Pa)
M=0.9
Stanton Sensor
M=0.5 M=0.3
M=0.7
Micro Sensor Time
Multi-sensor chip: Pressure, Temperature and Flow
2 mm 1 mm
1 cm
200 m Shear stress sensor
Pressure sensor
Temperature sensor
2 cm
Five sensor clusters with a pitch of 2 mm.
MEMS Mass Flow Meter
N2 Channel chip Inlet
Bonding wires Multi-sensor array chip PCB
picture of a packaged device
Schematic of packaged device
6.5
P (mW)
Channel width: 2.5 mm Channel height: 0.2 mm Channel length: 18 mm
6.0
5.5
5.0
0.0 0.5 1.0 1.5
Q1/2.2
Calibration of the thermal flowmeter
7.5 7.0
Power (mW)
6.5 6.0 5.5 5.0 0
Laminar flow Turbulent flow
10
Q (SLPM)
Non-linear output
Measurement of channel flow
1
26
0.15
p (psig)
25.5
V/ V0
1 2 3 4 5
0.5
T (oC)
0.1
25 24.5
0.05
0 1 2 3 4 5
24
0 1 2 3 4 5
Positon
Position
Position
(a) Pressure distribution
(b) Temperature distribution
(c ) Relative output change of shear stress sensors
Measurement of fully developed incompressible channel flow (Mach number = 0.2 )
16
27 26.5 26 25.5 25 1 2 3 4 5
V/ V0+ (V/ V0)2/2
0.35
p (psig)
T (oC)
0.25
11
0.15 1 2 3 4 5
6 1 2 3 4 5
Position
Position
Position
(a) Pressure distribution
(b) Temperature distribution
(c ) Relative output change of shear stress sensors
Measurement of fully developed compressible channel flow (Mach number = 0.6 )
Microflow (l) Sensor
Bottom View
Top View
Flow Rate Data
0 0 200 400 600 800 1000 1200 -0.001
Water Saline
-0.002
V [V]
-0.003
-0.004
-0.005
-0.006
-0.007
30 mA 36 mW
Q [ul/min]
Measures flow rates up to 10 l/min
0.7590
Flow Sensor Transient Data
0.7585
Voltage [V]
0.7580
0.7575
0.7570
0.7565 0 100 200 300 400 500 600 700 800 900 Time [sec]
No Flow & Intermittent Power
Nanoflow (nl) Sensors
Poly-Si Sensors Micro Channel Suspended Micro 200 m Channel
100100 m m
50 m
20 m Nitride Si
lightly B doped polysilicon 2 m
heavily B doped polysilicon
Cavity
~100 m
Temperature Change vs. Flow Rate
0 -1 T(oC) -2 -3 -4 -5 0 100 200 Q (nL/min) 300
Suspended channel ST 0.026 oC/(nL/min) Power 140W Top 10 oC Channel on substrate ST 0.0071oC/(nL/min)
Sensor Resolution
14 12
Frequency
Histogram
Measurement
Gausian
10 8 6 4 2 0 2.034 2.035 2.036 2.037 Sensor Output (V) 2.038
Time-averaged Resolution nL/min
Monocyte Attachment through Molecular Recognition
lipids trapped in arterial wall flow lipids stimulate EC Endothelial cells (EC)
Versatile Test Facility
monocyte attachment
ow l F
monocytes
sec 0 1 2 0 1 sec 2
Monocyte Attachment
Monocytes/Field
Control
Ox-PAPC
Ox-PAPC + Ox-PAPC + Ox-PAPC + High slew Rate Low Slew Rate Oscillating Flow
Other MEMS Applications
Micromachined Neurowell
neuron trapping canopy grillwork neurite growing in micro-tunnel
30 m
gold electrode
54 36 18
full-grown cell in neuron well
Spontaneous Spike Recording
Voltage (V)
0 -18 -36 -54 -72 -90
10
Recorded Data Hand-Fitted Curve
-108
Background 60 Hz averaged away.
time (msec)
Traditional ESI for Mass Spectrometry
particle filter air flow MS Inlet Vacuum inside MS Glass capillary 1-4 kV
Silica Capillary
Spray stability depends on: flow rate voltage distance
Caltech Micromachining Group
MS inlet hole
Taylor Cone
ESI Nozzle for Protein Mass Spectrometry
SEM of Capillary Tips
16+ 15+
2.5 mm
20+ Relative Abundance 19+ 21+ 22+ 23+
17+ 18+ 14+
13+ 24+
25+
12+
600
800
1000
1200
1400 m/z
Taylor Cone Formation
800 V
950 V
1250 V
15 m
15 m
15 m
Solution: 1% Acetic Acid 49.5% Methanol 49.5% Water Voltage: 800 V~ 1250 V Distance: 500 m from electrode
15 m
Caltech Micromachining Group
On the Microbat ...
Flying Onithopter
Transceiver Antenna MEMS Wings Wing Control Actuators
Acoustic Sensor Arrays CMOS Imaging Array Autopilot Computer
Gearbox and Transmission Power Management Electronics
Electric Motor
Battery
New MAV Design Specifications
Weight: 12.5 g Wing span: 9 inch Flapping amp.: 65 deg Flapping freq.: 20 Hz Flight velocity: 4 m/s Power required: 2 W Power source: Battery Propulsion: Flapping Wings
