<p>Arrangement and elements of the piezoresistive dual-microcantilever sensor: (<b>a</b>) simplified 3D sketch; (<b>b</b>) picture of the chip topology; (<b>c</b>) appearance of the sensor chip.</p> Full article ">Figure 2
<p>Amplitude–frequency characteristics of the dual-microcantilever sensor: (<b>a</b>) voltage differences of the two half-bridges; (<b>b</b>) absolute value of the voltage difference of the two half-bridges.</p> Full article ">Figure 3
<p>Loading of microcantilever 1 with Lorentz forces: (<b>a</b>) schematic of the mutual orientation of the two microcantilevers in a homogeneous magnetic field with induction <span class="html-italic">B</span> perpendicular to the plane of the beam; (<b>b</b>) microcantilever heater power supply 1 with adjustable current <span class="html-italic">i</span>; (<b>c</b>) microcantilever 1 heater power supply with adjustable current <span class="html-italic">i</span> in the reverse direction.</p> Full article ">Figure 4
<p>Experimental setup for testing piezoresistive sensors with two microcantilevers: (<b>a</b>) general view; (<b>b</b>) sensor with magnet stacks. 1, sensor; 2, NI PXI system; 3, ammeter; 4, Digilent sine signal generator; 5, variable resistors for current regulation in the microcantilever heater; 6, batteries; 7, monitor; 8, microchip; 9, piezoelectric actuator; 10, sensor housing; 11, neodymium magnet stacks.</p> Full article ">Figure 5
<p>Experimental data processing of an Excel file obtained at current <math display="inline"><semantics> <mi>i</mi> </semantics></math> = −750 µA. <math display="inline"><semantics> <mrow> <msub> <mi>V</mi> <mrow> <mi>a</mi> <mi>b</mi> <mi>s</mi> </mrow> </msub> </mrow> </semantics></math> is the measured shifted voltage, <math display="inline"><semantics> <mrow> <msub> <mi>V</mi> <mrow> <mi>a</mi> <mi>b</mi> <mi>s</mi> <mi>l</mi> </mrow> </msub> </mrow> </semantics></math> is the approximated left parabola, <math display="inline"><semantics> <mrow> <msub> <mi>V</mi> <mrow> <mi>a</mi> <mi>b</mi> <mi>s</mi> <mi>r</mi> </mrow> </msub> </mrow> </semantics></math> is the approximated right parabola, and <math display="inline"><semantics> <mrow> <msub> <mi>f</mi> <mrow> <mi>c</mi> <mi>e</mi> <mi>x</mi> <mi>p</mi> </mrow> </msub> </mrow> </semantics></math> is the experimentally obtained cusp point.</p> Full article ">Figure 6
<p>Cusp-point frequency shift under the influence of Lorentz forces and temperature–frequency coefficient: (<b>a</b>) thermal frequency shift only; (<b>b</b>) sum of thermal and Lorentz effects.</p> Full article ">Figure 7
<p>Frequency offset of the cusp-point amplitude–frequency response of the dual-microcantilever sensor.</p> Full article ">