Cho et al., 2020 - Google Patents
Simulation of capacitorless dynamic random access memory based on junctionless FinFETs using grain boundary of polycrystalline siliconCho et al., 2020
- Document ID
- 9975670320681443794
- Author
- Cho M
- Mun H
- Lee S
- Jang J
- Bae J
- Kang I
- Publication year
- Publication venue
- Applied Physics A
External Links
Snippet
In this paper, we report a junctionless FinFET-based capacitor less dynamic memory by using three-dimensional technology computer-aided design simulations. To realize the 1T- DRAM, the proposed device has been designed as a structure in which a poly-si layer is …
- 229910021420 polycrystalline silicon 0 title abstract description 43
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