Sviličić et al., 2015 - Google Patents
Widely tunable MEMS ring resonator with electrothermal actuation and piezoelectric sensing for filtering applicationsSviličić et al., 2015
View PDF- Document ID
- 992499671325976673
- Author
- Sviličić B
- Mastropaolo E
- Cheung R
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
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In this paper, we present the design, fabrication and testing of two-port ring microelectromechanical (MEMS) resonant devices with electrothermal actuation and piezoelectric sensing for wide tunable filter applications. The ring resonators have been …
- 238000001914 filtration 0 title description 3
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