Sadler et al., 1998 - Google Patents
Prototype microvalve using a new magnetic microactuatorSadler et al., 1998
- Document ID
- 97794575041415355
- Author
- Sadler D
- Liakopoulos T
- Cropp J
- Ahn C
- Henderson H
- Publication year
- Publication venue
- Microfluidic Devices and Systems
External Links
Snippet
In this paper, we describe the design, fabrication, and testing of a prototype microvalve which makes use of a novel magnetic microactuator. The completed device consists of three layers, with the bottom two layers making up the normally closed valve. The top layer …
- 230000005291 magnetic 0 title abstract description 38
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING ENGINES OR PUMPS
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Khoo et al. | A novel micromachined magnetic membrane microfluid pump | |
| Capanu et al. | Design, fabrication, and testing of a bistable electromagnetically actuated microvalve | |
| US6786708B2 (en) | Laminated devices and methods of making same | |
| US6116863A (en) | Electromagnetically driven microactuated device and method of making the same | |
| Sadler et al. | A new magnetically actuated microvalve for liquid and gas control applications | |
| Shinozawa et al. | A proportional microvalve using a bi-stable magnetic actuator | |
| Sutanto et al. | Design, microfabrication and testing of a CMOS compatible bistable electromagnetic microvalve with latching/unlatching mechanism on a single wafer | |
| Bae et al. | Feasibility test of an electromagnetically driven valve actuator for glaucoma treatment | |
| Bintoro et al. | An electromagnetic actuated on/off microvalve fabricated on top of a single wafer | |
| Rahbar et al. | Design, fabrication and characterization of an arrayable all-polymer microfluidic valve employing highly magnetic rare-earth composite polymer | |
| JP2004291187A (en) | Electrostatic microvalve and micropump | |
| Sadler et al. | Prototype microvalve using a new magnetic microactuator | |
| Luharuka et al. | A bistable electromagnetically actuated rotary gate microvalve | |
| Pawinanto et al. | Design and fabrication of compact MEMS electromagnetic micro-actuator with planar micro-coil based on PCB | |
| Pawinanto et al. | Electromagnetic micro-actuator with silicon membrane for fluids pump in drug delivery system | |
| Hesketh et al. | Microvalve for fuel cells and miniature gas chromatographic system | |
| Yufeng et al. | Electro-magnetically actuated valveless micropump with two flexible diaphragms | |
| Hahm | Microfabricated, silicon spring biased, shape memory actuated microvalve | |
| Duggirala et al. | A hybrid PZT-silicon microvalve | |
| Sutanto et al. | Designing and fabricating electromagnetically actuated microvalves for MEMS applications | |
| Moise et al. | Pump control system in microfluidic systems | |
| Cheng et al. | A transcutaneous controlled magnetic microvalve based on iron-powder filled PDMS for implantable drug delivery systems | |
| Li et al. | Design and fabrication of in situ UV-LIGA assembled robust nickel micro check valves for compact hydraulic actuators | |
| Bohm | c12) United States Patent | |
| Alam et al. | Design and Optimization of Electromagnetically Actuated Bidirectional Microvalve |