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Ezhilvalavan et al., 2000 - Google Patents

Progress in the developments of (Ba, Sr) TiO3 (BST) thin films for Gigabit era DRAMs

Ezhilvalavan et al., 2000

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Document ID
9673100649384335241
Author
Ezhilvalavan S
Tseng T
Publication year
Publication venue
Materials Chemistry and Physics

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This paper reviews the recent developments of (Ba, Sr) TiO3 (BST) thin films for future Gbit era dynamic random access memory (DRAM) applications. The trends of DRAM capacitors in the last decade are briefly described first. Then the technological aspects of BST films …
Continue reading at ir.lib.nycu.edu.tw (PDF) (other versions)

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