Atoda et al., 1992 - Google Patents
Present status of the SORTEC SR FacilityAtoda et al., 1992
- Document ID
- 9491605796195804811
- Author
- Atoda N
- Awaji N
- Kodaira M
- Kishimoto T
- Nishino J
- Koga K
- Maejima Y
- Higashigawa I
- Yanagida K
- Publication year
- Publication venue
- Review of scientific instruments
External Links
Snippet
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Enable full ADS view NASA/ADS Present status of the SORTEC SR Facility Atoda, N. ; Awaji,
N. ; Kodaira, M. ; Kishimoto, T. ; Nishino, J. ; Koga, K. ; Maejima, Y. ; Higashigawa, I. ; Yanagida …
- 238000001015 X-ray lithography 0 abstract description 4
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