[go: up one dir, main page]

Mukhopadhyay et al., 2007 - Google Patents

Exploiting differential etch rates to fabricate large-scale nozzle arrays with protudent geometry

Mukhopadhyay et al., 2007

Document ID
9449034148403458815
Author
Mukhopadhyay D
Ferreira P
Publication year
Publication venue
Journal of Micromechanics and Microengineering

External Links

Snippet

Nozzles with micro and nanometer scale orifices are playing an increasingly important role in many micro and nano devices, processes and characterization applications such as cell sorters, micro deposition of structures and near-field optical scanning. This paper describes …
Continue reading at iopscience.iop.org (other versions)

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing micro-systems without movable or flexible elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICRO-STRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of micro-structural devices or systems
    • B81C2201/01—Manufacture or treatment of micro-structural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning

Similar Documents

Publication Publication Date Title
Choi et al. Fabrication of a dense array of tall nanostructures over a large sample area with sidewallprofile and tip sharpness control
US9487002B2 (en) High resolution electrohydrodynamic jet printing for manufacturing systems
Mishra et al. High-speed and drop-on-demand printing with a pulsed electrohydrodynamic jet
KR20080113095A (en) Superhydrophobic surface manufacturing apparatus and method
JP5501250B2 (en) Method for fabricating a three-dimensional nanostructure with nanosubstructures, and an insulating pyramid with a metal tip obtainable by this method, a pyramid with a nanoaperture, and a pyramid with horizontal and / or vertical nanowires
EP2823357B1 (en) A method for manufacturing a tool part for an injection molding process, a hot embossing process, a nano-imprint process, or an extrusion process
KR20080066067A (en) Electro-Hydraulic Printing and Manufacturing
JP2014158037A (en) Method of forming nozzle
WO2001033614A1 (en) Method for fabricating arrays of micro-needles
Kang et al. The fabrication of patternable silicon nanotips using deep reactive ion etching
US8377321B2 (en) Method of forming a nozzle and an ink chamber of an ink jet device by etching a single crystal substrate
Mukhopadhyay et al. Exploiting differential etch rates to fabricate large-scale nozzle arrays with protudent geometry
US8544997B2 (en) Liquid ejection head and manufacturing method thereof
Saya et al. Collective fabrication of an in-plane silicon nanotip for parallel femtoliter droplet deposition
JP4384844B2 (en) Membrane structure for microelements, microelements including film structures, and methods for making film structures
JP4375865B2 (en) Inkjet nozzle fine manufacturing method
Umrani Fabrication of micro pillar arrays via aerosol jet printing
Denoual et al. Accurate double-height micromolding method for three-dimensional polydimethylsiloxane structures
Wang et al. Fabrication of Au micropatterns on vertical Si sidewalls using flexible PDMS shadow masks
Wang et al. High aspect ratio sharp nanotip for nanocantilever integration at CMOS compatible temperature
Miles et al. Microfabricated deep-etched structures for ICF and equation-of-state targets
Chen et al. Fabrication of high-aspect-ratio nanotips integrated with single-crystal siliconcantilevers
US11035880B2 (en) Method for producing a probe suitable for scanning probe microscopy
Yapici et al. A novel micromachining technique for the batch fabrication of scanning probe arrays with precisely defined tip contact areas
CN101391241A (en) Spray hole structure and preparation method