[go: up one dir, main page]

Chu et al., 2000 - Google Patents

Novel multibridge-structured piezoelectric microdevice for scanning force microscopy

Chu et al., 2000

View PDF
Document ID
9347507819633538074
Author
Chu J
Wang Z
Maeda R
Kataoka K
Itoh T
Suga T
Publication year
Publication venue
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

External Links

Snippet

In this article we report the structure and the microfabrication method of a novel micro- scanning force microscopy (SFM) device. It is a lead zirconate titanite (PZT) bimorph structure in the shape of a cantilever supported by bridges. Electric fields applied to the …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/08—Probe characteristics
    • G01Q70/10—Shape or taper

Similar Documents

Publication Publication Date Title
Chu et al. Novel multibridge-structured piezoelectric microdevice for scanning force microscopy
Lee et al. Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities
Watanabe et al. Micro‐fabricated piezoelectric cantilever for atomic force microscopy
Fujii et al. Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope
Minne et al. Parallel atomic force microscopy using cantilevers with integrated piezoresistive sensors and integrated piezoelectric actuators
Lee et al. Characterization of micromachined piezoelectric PZT force sensors for dynamic scanning force microscopy
Miller et al. Microelectromechanical scanning probe instruments for array architectures
Davis et al. Fabrication and characterization of nanoresonating devices for mass detection
US5537863A (en) Scanning probe microscope having a cantilever used therein
JP3576677B2 (en) Electrostatic actuator, probe using the actuator, scanning probe microscope, processing device, recording / reproducing device
Pedrak et al. Micromachined atomic force microscopy sensor with integrated piezoresistive sensor and thermal bimorph actuator for high-speed tapping-mode atomic force microscopy phase-imaging in higher eigenmodes
Xu et al. Integrated micro‐scanning tunneling microscope
Akamine et al. A planar process for microfabrication of a scanning tunneling microscope
US8646111B2 (en) Coupled mass-spring systems and imaging methods for scanning probe microscopy
Albrecht et al. Microfabrication of integrated scanning tunneling microscope
Itoh et al. Scanning force microscope using a piezoelectric microcantilever
Indermühle et al. Fabrication and characterization of cantilevers with integrated sharp tips and piezoelectric elements for actuation and detection for parallel AFM applications
Indermühle et al. Atomic force microscopy using cantilevers with integrated tips and piezoelectric layers for actuation and detection
Alipour et al. A MEMS nanopositioner with integrated tip for scanning tunneling microscopy
Lee et al. Fabrication of a ZnO piezoelectric micro cantilever with a high-aspect-ratio nano tip
Hoummady et al. Micromachines for nanoscale science and technology
Chu et al. Microfabricated dynamic scanning force microscope using a three dimensional piezoelectric T-shape actuator
Mahdavi et al. A high dynamic range AFM probe with collocated piezoelectric transducer pairs
JP3610108B2 (en) Information processing device
Nam et al. Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy