McKenzie et al., 1995 - Google Patents
Design and construction of a multiple-wafer integrated micromechanical optical actuatorMcKenzie et al., 1995
- Document ID
- 9321708355426471786
- Author
- McKenzie J
- Clark C
- Jones B
- Jacobs-Cook A
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
Optically powered fluid actuators are under development for use in'control-by-light'systems including one based on photothermal effects inside a closed cell. The miniaturisation of the converted has been shown to improve the speed of operation of this device substantially …
- 230000003287 optical 0 title description 18
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