Park et al., 2003 - Google Patents
Effect of nonthermal plasma reactor for CF/sub 4/decompositionPark et al., 2003
- Document ID
- 9269177122879739578
- Author
- Park J
- Jung J
- Kim J
- Rim G
- Kim K
- Publication year
- Publication venue
- IEEE transactions on plasma science
External Links
Snippet
In this paper, the CF/sub 4/decomposition efficiency is investigated for three simulated plasma reactors: needle-plate reactor (NPR); metal-particle reactor (MPR); and dielectric- barrier reactor with hole (DBH). The CF/sub 4/decomposition efficiency by DBH is much …
- 238000000354 decomposition reaction 0 title abstract description 44
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
- H01J37/32431—Constructional details of the reactor
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