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McDaniel et al., 2012 - Google Patents

Growth and characterization of epitaxial anatase TiO2 (001) on SrTiO3-buffered Si (001) using atomic layer deposition

McDaniel et al., 2012

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Document ID
8913809845255566709
Author
McDaniel M
Posadas A
Wang T
Demkov A
Ekerdt J
Publication year
Publication venue
Thin Solid Films

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Epitaxial anatase titanium dioxide (TiO2) films have been grown by atomic layer deposition (ALD) on Si (001) substrates using a strontium titanate (STO) buffer layer grown by molecular beam epitaxy (MBE) to serve as a surface template. The growth of TiO2 was …
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