Lee et al., 2017 - Google Patents
A Study of Polishing Feature of Ultrasonic‐Assisted Vibration Method in Bamboo CharcoalLee et al., 2017
View PDF- Document ID
- 8613507795664462350
- Author
- Lee H
- Chen T
- Publication year
- Publication venue
- Advances in Materials Science and Engineering
External Links
Snippet
Focusing on the feature of porosity in bamboo charcoal, this study applies the ultrasonic‐ assisted vibration method to perform surface polishing of the silicon wafer workpiece. The self‐developed bamboo charcoal polishing spindle and ultrasonic‐assisted vibration …
- 238000005498 polishing 0 title abstract description 100
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
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