Adams et al., 2000 - Google Patents
Microgrooving and microthreading tools for fabricating curvilinear featuresAdams et al., 2000
View PDF- Document ID
- 8489649908991792543
- Author
- Adams D
- Vasile M
- Krishnan A
- Publication year
- Publication venue
- Precision Engineering
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Snippet
This paper presents techniques for fabricating microscopic, curvilinear features in a variety of workpiece materials. Microgrooving and microthreading tools with cutting widths as small as 13 μm are made by focused ion beam sputtering and used for ultraprecision machining …
- 238000005520 cutting process 0 abstract description 55
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