van Hoek, 2018 - Google Patents
Department of Precision and Microsystems Engineeringvan Hoek, 2018
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- 750048973901074718
- Author
- van Hoek N
- Publication year
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This thesis is the conclusion the Precision and Micro-systems Engineering Master's programme at Delft University of Technology. I have had the pleasure of fulfilling this program in the fun and inspiring work environment of the department of Precision and Micro …
- 238000011160 research 0 abstract description 15
Classifications
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37275—Laser, interferometer
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