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Welty et al., 2004 - Google Patents

Minority carrier transport properties of GaInNAs heterojunction bipolar transistors with 2% nitrogen

Welty et al., 2004

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Document ID
721174131558646465
Author
Welty R
Xin H
Tu C
Asbeck P
Publication year
Publication venue
Journal of applied physics

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Snippet

GaAs-based heterojunction bipolar transistors (HBTs) have a relatively large turn-on voltage of approximately 1.4 V that can only be decreased by reducing the band-gap energy of the base material. For a variety of applications, particularly operation with low power supply …
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    • H01L29/66—Types of semiconductor device; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/70—Bipolar devices
    • H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
    • H01L29/73—Bipolar junction transistors
    • H01L29/737—Hetero-junction transistors
    • H01L29/7371—Vertical transistors
    • H01L29/7378—Vertical transistors comprising lattice mismatched active layers, e.g. SiGe strained layer transistors
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    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
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    • H01L29/66007—Multistep manufacturing processes
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