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Haiducu, 2009 - Google Patents

Low-cost microfluidics on commercial grade poly (methyl methacrylate)(PMMA) using deep-UV patterning

Haiducu, 2009

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Document ID
7007095151871081734
Author
Haiducu M
Publication year

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This thesis outlines a novel technique to economically pattern poly (methyl methacrilate)(PMMA) using a deep-UV radiation source in order to produce functional microfluidic components. PMMA has been used as a photoresist for many processes and …
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