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He et al., 2009 - Google Patents

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

He et al., 2009

Document ID
6994766264768781995
Author
He X
Wu Q
Wang Y
Song M
Yin J
Publication year
Publication venue
Microsystem technologies

External Links

Snippet

The MEMS capacitive switch based on fixed-fixed microbeam has garnered significant attention due to their geometric simplicity and broad applicability. The accurate model which describes the multiphysical coupled-field of MEMS capacitive switch should be developed to …
Continue reading at link.springer.com (other versions)

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/50—Computer-aided design
    • G06F17/5009—Computer-aided design using simulation
    • G06F17/5018—Computer-aided design using simulation using finite difference methods or finite element methods
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING; COUNTING
    • G06F—ELECTRICAL DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/50—Computer-aided design
    • G06F17/5086—Mechanical design, e.g. parametric or variational design

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