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Banerjee et al., 2018 - Google Patents

Composite GaN–C–Ga (“GaCN”) layers with tunable refractive index

Banerjee et al., 2018

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Document ID
6979988482954914517
Author
Banerjee S
Onnink A
Dutta S
Aarnink A
Gravesteijn D
Kovalgin A
Publication year
Publication venue
The Journal of Physical Chemistry C

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Snippet

This article describes novel composite thin films consisting of GaN, C, and Ga (termed “GaCN”, as an analogue to BCN and other carbonitrides) as a prospective material for future optical applications. This is due to their tunable refractive index that depends on the carbon …
Continue reading at pubs.acs.org (PDF) (other versions)

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    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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