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Helgadottir et al., 2013 - Google Patents

Synthesis of bimetallic nanoparticles in ionic liquids: Chemical routes vs physical vapor deposition

Helgadottir et al., 2013

Document ID
6934028962517715240
Author
Helgadottir I
Arquillière P
Bréa P
Santini C
Haumesser P
Richter K
Mudring A
Aouine M
Publication year
Publication venue
Microelectronic engineering

External Links

Snippet

To meet the constant challenges of miniaturization in the microelectronics industry, new innovative pathways must be explored to produce nano-objects. Ionic liquids (ILs) can be used to generate and stabilize metallic nanoparticles (MNPs) by several physical and …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof

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