Depuy, 1976 - Google Patents
Masking with Matched SetsDepuy, 1976
- Document ID
- 621924764572546608
- Author
- Depuy A
- Publication year
- Publication venue
- Developments in Semiconductor Microlithography
External Links
Snippet
The emphasis today in wafer fabrication is to continually improve device yields. This is usually accomplished at the expense of the mask maker, who is consistently being requested to provide masks of higher and higher quality. Higher mask quality is also desired …
- 230000000873 masking 0 title description 34
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING; COUNTING
- G06F—ELECTRICAL DIGITAL DATA PROCESSING
- G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
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