Gnanasambanthan et al., 2022 - Google Patents
Reusable thin stainless steel shadow mask fabrication using electron discharge machiningGnanasambanthan et al., 2022
- Document ID
- 6173267380857128461
- Author
- Gnanasambanthan H
- Maji D
- Publication year
- Publication venue
- 2022 IEEE 7th International conference for Convergence in Technology (I2CT)
External Links
Snippet
A method to fabricate thin stainless steel shadow mask has been presented in this work. A 200 μm thick stainless steel sheet metal has been utilized to fabricate a shadow mask of our interest using Wire-Cut Electron Discharge Machining (EDM). The fabricated mask can be …
- 229910001220 stainless steel 0 title abstract description 13
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
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