Dowling et al., 2020 - Google Patents
Position observer based galvanometer scanner and XY stage synchronization for large area processingDowling et al., 2020
- Document ID
- 6146093660961363171
- Author
- Dowling K
- Bhut B
- Lucas M
- Sivam S
- Hsu Y
- Shahar A
- Li J
- Publication year
- Publication venue
- Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV
External Links
Snippet
In this paper we present a novel sub-system for synchronizing motion of the galvanometer- based scanner and the XY stage system using a compact single controller that is independent of XY stage type or manufacturer. This integration directly utilizes the stage's …
- 238000005516 engineering process 0 description 7
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/4097—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by using design data to control NC machines, e.g. CAD/CAM
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS], computer integrated manufacturing [CIM]
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/37—Measurements
- G05B2219/37275—Laser, interferometer
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TW494041B (en) | Method and system for precisely positioning a waist of a material-processing laser beam to process microstructures within a laser-processing site | |
| US10328411B2 (en) | Apparatuses and methods for accurate structure marking and marking-assisted structure locating | |
| CN100437407C (en) | Abbe error correction system and method | |
| US8238007B2 (en) | On-the-fly laser beam path error correction for specimen target location processing | |
| CN113427134A (en) | Multi-axis laser processing system for on-machine error detection and correction | |
| CN109509602B (en) | Laser resistance-adjusting machine | |
| CN104097402A (en) | Laser marking machine and marking method thereof | |
| EP1613445B1 (en) | Positioning method and apparatus | |
| US20090153824A1 (en) | Multiple chuck scanning stage | |
| Dowling et al. | Position observer based galvanometer scanner and XY stage synchronization for large area processing | |
| CN113290330A (en) | Laser processing head space position calibration method of six-axis five-linkage machine tool | |
| Chen et al. | Compensating technique of field-distorting error for the CO2 laser galvanometric scanning drilling machines | |
| CN1317667C (en) | On-the-fly beam path error correction for memory link processing | |
| CN113319424B (en) | Three-dimensional shape accurate control processing system and processing method | |
| CN212443733U (en) | Special-shaped cutting system based on galvanometer and AB deflection axis position coordinates | |
| Ye et al. | Laser scanning confocal image alignment assists sub-micron accuracy micro-assembly | |
| CN111822852A (en) | Special-shaped cutting system and method based on position coordinates of galvanometer and AB yaw axis | |
| CN116453997B (en) | Chip positioning method and device | |
| CN116038103B (en) | A free-form surface multi-laser processing platform collaborative processing device and method | |
| Wertjanz et al. | Range extension for large-scale robotic precision 3-D measurements in vibration-prone environments | |
| Huang et al. | A Comprehensive Evaluation of Accuracy and Performance Metrics for a Laser On-the-Fly Processing Control System | |
| JP2006055880A (en) | Multi-cavity processing method for femtosecond laser light | |
| Yoon et al. | Control Techniques for Uni-Axial Continuous Laser Fabrication | |
| Rathmann et al. | Sensor guided micro assembly by using laser-scanning technology | |
| DE102021209270A1 (en) | LASER PROCESSING DEVICE AND METHOD FOR CORRECTING A POSITION OF A BUNTED POINT |